ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...

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ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
G.-F. Dalla Betta                                         Feb. 6, 2017

                    ATLAS ITk
             CSN1 Meeting – Roma, 6 Febbraio 2017
            Gian-Franco Dalla Betta1, Claudia Gemme2
                    1 Universityand TIFPA INFN / Trento
                               2 INFN Genova

              On behalf of RD_FASE2: ATLAS Pixel
                    BO, CS, GE, MI, TN, UD
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
Overview of the Phase-II Pixel upgrade
ü The project is now accelerating significantly given the schedule for the
  Pixel TDR (Dec 2017).

                                                     • Possibility to have two FE
                                                       submissions is included in the
                                                       schedule. Module op:miza:on
                                                       can start with first chip.
                                                     • Module produc:on and
                                                       loading: ~27-33 months

                                                                                  2
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
Overview of the Phase-II Pixel upgrade
ü The project is now accelerating significantly given the schedule for the
  Pixel TDR (Dec 2017).
                           Zoom in 2017:
                               •   Layout definition will allows groups to take
                                   commitments on parts of detector.
                                     • and preliminary design of the local supports.
                               •   RD53-A will be submitted in spring 2017à
                                   technological demonstrator of the 65 nm technology
                                   and module prototypes with small pixel size.
                               •   Bump bonding marker survey.
                               •   Sensors: identify the baseline designs to be used in
                                   the detector. A preliminary design of the data
                                   transmission and power distribution scheme will be
                                   included in the TDR.
                               •   Start of ATLAS chip design.

                                                                                       3
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
G.-F. Dalla Betta      4                   Feb. 6, 2017

                                  INFN Contribution to ITk & R&D’s
Main target of the R&D

                         – 3D Pixel Sensors → RD_FASE2 – (common with CMS)
                            • In partnership with FBK (Trento)
                            • Baseline technology in Layer 0 (maybe also L1 and Ring0)
                         – Bump-bonding → RD_FASE2 (in part common with CMS)
                            • Indium thermo-compression process with Leonardo (ex Selex)
                         – Pixel R/O chip (RD53) → common CHIPIX65 project of CSN5
                         – Pixel module assembly / tes:ng → RD_FASE2
                         – CMOS sensors (with STM) → HVR_CCPD project of CSN5
                         – Mul: module R/O & DAQ → RD_FASE2
                         – Local support / CO2 cooling → RD_FASE2
                         – Simula:on & tracking
                                                   Several topics also co-funded
                                                                             4 by EU AIDA2020
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
G.-F. Dalla Betta              5                          Feb. 6, 2017

     Assegnazioni RD_FASE2 a ITk 2014-2017
                         (inclusi items comuni con CMS)
  A3vità       Descrizione                          BO     CS   GE     MI    TN UD TOT
               Sviluppo sensori con FBK
    3D                                               -     -    65       -   38.5   - 103.5
               (inclusi substra:, etc.)
               Bump bonding di moduli per
    BB         sensori & Qualificazione Bump          -     -    62     110    -     -   172
               bonding ad alta densita’ su W. 12”
               Assemblaggio moduli, test,
 MODULI                                              -     7    22       2   8.5    2   41.5
               irraggiamen:, etc.
               Sviluppo sistema READ-OUT
READ-OUT                                            42.5   -     -       -    -     -   42.5
               mul: modulo
MECCANICA QA suppor: locali e contributo al
                                                     -     8    26     57     -     -   91
E COOLING Cooling System ITk

                 Total per Group                    42.5 15     175 169 47          2 450.5
                   Grand Total                                   450.5
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
G.-F. Dalla Betta           6                         Feb. 6, 2017

                             Milestones 2014
Data          Descrizione                                                   %     Note

31-05-2014    Presentazione documenti relativi alle attivita' di R&D,       100
              pianificazione temporale e gruppi coinvolti
20-12-2014    Realizzazione batch sensori planari a                         100
              FBK con prove tecniche di foratura

                             Milestones 2015
Data         Descrizione                                             %          Note

31-07-2015 Verifica batch FBK n. 2 pixel planari su wafer DWB        100
           6". Se positiva seguono test di moduli single ROC
           con pixel planari
30-11-2015 Qualifica della prima produzione di pixel                    0       Riportata
           3D single side FBK                                                   al 2016
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
G.-F. Dalla Betta           7                        Feb. 6, 2017

                                 Milestones 2016
Data            Descrizione                                 %     Note

31-07-2016      Pixels, Caratterizzazione in clean          100
                room di dispositivi planari e 3D
30-11-2016      Pixels, test in laboratorio di moduli 3D    100

30-11-2016      Pixels,Definizione Layout per pixel 3D e    100
                planari compatibili con i prototipi del
                chip di lettura previsto per RD53

                                 Milestones 2017
Data             Descrizione                                %     Note

31-07-2017       Prove su fascio di rivelatori a pixel 3D   100
                 con chip di lettura FEI4 e PSI46dig
31-10-2017       Caratterizzazioni in laboratorio di              Confidenti di
                 sensori a pixel planari con pitch                soddisfare
                 50x50um e 25x100um                               pienamente
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
Italian R&Ds à 3D sensors
ü Achieved so far:
   • Feasibility of small-pitch 3D demonstrated, tested with large pitch read-out
   • Extensive testing of 3D modules under way with good results
   • Very promising results also from irradiated test structures

                                       Preliminary
                                       test beam
                                       results

                                                                               8
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
Italian R&Ds à 3D sensors
 ü Achieved so far:
     • Feasibility of small-pitch 3D demonstrated
     • Extensive testing of 3D modules under way with good results
     • Very promising results also from irradiated test structures

ü Towards the TDRà Qualify FBK as a 3D vendor
   • Need to qualify sensors for extreme radiation
     hardness.                                                    3D wafer: New layout

       • proceed with irradiations of FE-I4 modules, looking
         forward to RD53A ROCs (~fall 2017)
   • One 3D batch being launched now (funded by AIDA
     2020), another one (already funded by RD_FASE2) to
     be produced, essential to finalize this R&D, still waiting
     for the new agreement with FBK for pixel sensors.

                                                                                         9
ATLAS ITk BO, CS, GE, MI, TN, UD - CSN1 Meeting - Roma, 6 Febbraio 2017 Gian-Franco Dalla Betta1, Claudia Gemme2 On behalf of RD_FASE2: ATLAS ...
Italian R&Ds à Bump-Bonding@Leonardo
ü Achieved so far:
     • Bump bonded FBK 3D and planar sensors.
     • High bump density deposition (50x50 µm2 over 2x2 cm2) validated with
       electrical and visual QA on 6” wafers with dummy chains.
     • Started validation of high density BB on 12” wafer. So far just bump
       deposition on bare Silicon.
                                  Bump R of dummy chains

Source scan of a 3D sensor bump
bonded to a +FEI4 by Leonardo

                                                           High density Bumps X-ray   10
Italian R&Ds à Bump-Bonding@Leonardo
 ü Achieved so far:
     • Bump bonded FBK 3D and planar sensors.
     • High bump density deposition (50x50 µm2 over 2x2 cm2) validated with
       electrical and visual QA on 6” wafers with dummy chains.
     • Started validation of high density BB on 12” wafer. So far just bump
       deposition on bare Silicon.

ü Towards the TDRà Qualify Leonardo as a BB vendor
   • Next step is to deposit bumps on 12” wafer with
     resistive chains. If successful to be used for
     RD53A wafer in Fall 2017
   • For the TDR and beyond: Qualify Leonardo to do
     high density In bump deposition on 12” wafers
                                                                  12” dummy chain wafer
     and maybe part of the flip-chip.
       • Deposited wafers may be flip-chipped by users in
         the collaboration (BCN, Moscow, Glasgow, Geneva,
         etc...).
                                                                                     11
Italian R&Ds à Read-out
ü Profiting of IBL (and Pixel Layer 2/1 on-going upgrades) experience
  in Read-Out Card design/production/qualification.
ü The idea is to produce a table top card, replacing the ROC+BOC
  current pit implementation:
   • Manpower: 2 FTE with electronics Workshop in Bologna
   • For the TDR: qualify the system for the detector offline readout.

                                                                         12
Italian R&Ds à Mechanics/Cooling

          Plant in USA15                           PP2                  PP1

                           7

        Chiller

                               9
                                   Transfer line          8
                       Pump                                                                7

                               2                    3 4                5
                   1                                                          6   Staves
                                                          PP1 Splitting box

ü Participation to the ITK cooling
  system with the design,
  construction and tests of the
  splitting box (Genova):
    • Prototypes to be ready in
      summer for QA at CERN.

                                                                                               13
Italian R&Ds à Mechanics/Cooling
ü CO2 evaporative system with recycle now available for ATLAS and LHCb
  in Milano.
ü Slim longeron (Support of the inclined solution)
      • Manufacturing of the Al moulding.
      • Thermo mechanical FEA: stress in the cell critical interfaces and thermal
        radiation effect studies.       Al mould short prototype

                                                           Cell FEA studies

SLIM Local Support
for Inclined Layout

• Planned CO2 tests of cooling circuits with the 2PACL Traci unit.
• Planned measurement of the cell solder/tim interfaces before and after
  cooling/pressure cycles.
                                                                                    14
Aggio
E cosa costruiamo?                                                     rn
                                                                 un p amenti in
                                                                     aio di
                                                                            mesi
ü We are discussing if to take responsibility of building one End-cap,
  so far uncovered.
    • The other one is built by UK colleagues.
    • Building the innermost barrel layers - as originally proposed to better
      match our sensor interests - seems to be difficult as there is a strong
      US interest and our design and engineering capabilities are limited.
    • This is not expected to damage our interest and leadership in the 3D
      sensors as the pixel production model decouples the module
      production&test from their installation on detector.

ü Meeting in Genova on Feb 8/9 to discuss the current status of the
  activities, push them to be relevant in the Pixel TDR and discuss if
  to take the responsibility to deliver the End-cap.

ü This is an ambitious project (2.5 m length, 60 cm diameter, 2.5 m2
  surface) but may be a big opportunity to boost the Italian
  contribution:
    • New groups have shown interests in this opportunity (Lecce, Frascati).
                                                                                15
Production organization for the pixel detector
       Lab1Lab1                       Lab1Lab2
               Lab3                                                Modules and
                      LabN                        LabM
                                                                   Supports QA sites
                                                                   are not necessarily
            Pool of Qualified               Pool of Qualified        correlated to the
               Modules                        Supports             Loading sites
             (3D, planar…)                 (Staves, Half-Rings)

   Barrel Loading Sites receive                         EC Loading Sites receive
   QA Staves + QA module                                QA Half-rings + QA
                                  Module Loading:       modules
                                  Robot, Survey
                                  Loaded supports
                                  QA:
                                  HW setup, source,
                                  cold box
Aggio
A possible model for Italy                                     rn
                                                         un p amenti in
                                                             aio di
                                                                    mesi

ü Module Assembly e QA:
   • Assembly e QA dei 3D (~1 m2 /2 vendors ) – per paragone 0.04 m2 sono i
     3D installati in IBL.
      • Altro se necessario per il nostro share.
   à Coinvolgere piu’ lab: almeno 2 per module assembly, 4-5 per module QA.
      àE’ MOLTO importante per il formare competenze per l’operazione negli
         anni futuri!

ü Module Loading and QA:
   • A Genova montati in passato ~ 40 staves (~500-600) moduli.
       • Procedura lenta , va sicuramente ottimizzata.
   à1/2 siti per il Loading (Genova/xx)
   à Almeno 2 siti per la QA dei moduli sui supporti.

ü Integration:
   • To be defined.
Aggio
                                                                                                 rnam
                                                                                          uFeb.
                                                                                           n pa6,i 2017ent
                  G.-F. Dalla Betta          18                                                   o di m i in
                                                                                                         esi
                            Riassunto FTE 2017
                                                         Sezione   First+Name      Family+Name       Ruolo        RD_FASE2+ HVR_CCPD CHIPIX65 AIDA2020
                                                         BO        Federica        Fabbri            PhD             0,20       1        1         1
                                                         BO        Davide3         Falchieri         Tecn.3Cat.3D    0,20       1        1         1

     Total for the 4 R&D of interest for ITk             BO
                                                         BO
                                                                   Alessandro3
                                                                   Carla
                                                                                   Gabrielli
                                                                                   Sbarra
                                                                                                     RU
                                                                                                     RIC
                                                                                                                     0,20
                                                                                                                       1
                                                                                                                                1
                                                                                                                              0,20
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                   1
                                                         BO        Antonio         Sidoti            RIC             0,20     0,20       1         1
     - 39 persons (same as in 2016)                      BO
                                                         CS
                                                                   Maximiliano
                                                                   Anna
                                                                                   Sioli
                                                                                   Mastroberardino
                                                                                                     PA
                                                                                                     RU
                                                                                                                     0,20
                                                                                                                     0,50
                                                                                                                                1
                                                                                                                                1
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                   1
                                                         CS        Daniela         Salvatore         Assegnista      0,30       1        1         1
     - 18 FTE (was 16.2 in 2016)                         GE
                                                         GE
                                                                   Giovanni
                                                                   Andrea
                                                                                   Darbo
                                                                                   Favareto
                                                                                                     DR
                                                                                                     Assegnista
                                                                                                                     0,60
                                                                                                                     0,30
                                                                                                                              0,30
                                                                                                                                1
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                   1
                                                         GE        Andrea          Gaudiello         PhD             0,50     0,30       1         1
                                                         GE        Claudia         Gemme             RIC             0,20     0,10       1       0,15
                                                         GE        Silvia          Miglioranzi       Assegnista      0,20       1        1         1
                                                         GE        Paolo           Morettini         11RIC           0,60     0,20       1         1
Sez.    RD_FASE2 HVR_CCPD CHIPIX65 AIDA2020              GE
                                                         GE
                                                                   Hideyuki
                                                                   Leonardo
                                                                                   Oide
                                                                                   Rossi
                                                                                                     Borsa
                                                                                                     DR
                                                                                                                     0,40
                                                                                                                     0,20
                                                                                                                                1
                                                                                                                              0,10
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                   1
                                                         GE        Cecilia         Rossi             Tecn.           0,30       1        1         1
BO         1.00            0.40        -           -     GE
                                                         MI
                                                                   Mario3
                                                                   Gianluca
                                                                                   Sannino
                                                                                   Alimonti
                                                                                                     PA
                                                                                                     RIC
                                                                                                                     0,40
                                                                                                                     0,50
                                                                                                                              0,20
                                                                                                                                1
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                 0,20
                                                         MI        Attilio         Andreazza         PA                1      0,30       1         1

CS         0.80              -         -           -     MI
                                                         MI
                                                                   Mauro
                                                                   Simone
                                                                                   Citterio
                                                                                   Coelli
                                                                                                     D1TEC
                                                                                                     Tecn.
                                                                                                                       1
                                                                                                                     0,40
                                                                                                                              0,10
                                                                                                                                1
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                   1
                                                         MI        Luca            Frontini          PhD               1        1      0,60        1
                                                         MI        Danilo          Giugni            P1TEC           0,50       1        1         1
GE         3.70            1.20        -          0.15   MI        Valentino       Liberali          PA                1      0,20     0,40        1
                                                         MI        Chiara          Meroni            DR              0,25     0,30       1       0,15
                                                         MI        Francesco       Ragusa            PO              0,10     0,30       1         1
MI         2.12            1.20       1.50        0.35   MI        Seyedruhollah   Shojali           Assegnista        1        1      0,50        1
                                                         MI        Clara           Troncon           11RIC           0,37       1        1         1
                                                         TN        Maurizio        Boscardin         RIC             0,10       1        1         1
TN         3.30              -         -          1.00   TN        Gian1Franco     Dalla3Betta       PO              0,50       1        1         1
                                                         TN        Mostafa         El3Khatib         PhD             0,50       1        1         1
                                                         TN        Roberto         Iuppa             RTD1A           0,10       1        1         1
UD         1.30              -         -           -     TN
                                                         TN
                                                                   David
                                                                   Roberto
                                                                                   Macii
                                                                                   Mendicino
                                                                                                     PA
                                                                                                     PhD
                                                                                                                     0,70
                                                                                                                       1
                                                                                                                                1
                                                                                                                                1
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                 1,00
                                                         TN        D3M3S           Sultan            PhD             0,70       1        1         1
Total     12.22            2.80       1.50        1.50   TN
                                                         UD
                                                                   Giovanni
                                                                   Mario3Paolo
                                                                                   Verzellesi
                                                                                   Giordani
                                                                                                     PO
                                                                                                     RU
                                                                                                                     0,70
                                                                                                                     0,30
                                                                                                                                1
                                                                                                                                1
                                                                                                                                         1
                                                                                                                                         1
                                                                                                                                                   1
                                                                                                                                                   1
                                                         UD        Gilberto        Giugliarelli      RU              1,00       1        1         1
                                                                   Total                        39                  12,22     2,80     1,50      1,50

Lecce e Frascati hanno dimostrato serio interesse a partecipare;
altri laboratori potrebbero aumentare il loro contributo à FTE>25 nei prossimi anni
G.-F. Dalla Betta                       Feb. 6, 2017

                                Itk Money Matrix
 Pixel Contributions Italy

Common Item Contribution Italy              GRAND TOTAL = 6282,60 kCHF
Final Message
ü 2017 important steps:

   • Contribute to the TDR!

   • Test 3D sensor at very high fluence and produce new batches for
     test and assembly with RD53A.

   • Qualify the high density bump deposition on 12” wafers.

   • Choose a detector part to built and contribute with our expertize
     there.

                                                                     20
G.-F. Dalla Betta   21   Feb. 6, 2017

Back-Up Slides
•   Funding 2014-2017
•   General ITK
•   Sensors
•   Bump Bonding
•   Mechanics
•   ITk Cooling
•   Electronics
G.-F. Dalla Betta   22   Feb. 6, 2017

             RD_FASE2: Assegnazioni 2017
Funding
23
          G.-F. Dalla Betta                                      Feb. 6, 2017

              RD_FASE2: Assegnazioni 2016

                                                         1                        2
Funding

                                                                       3

                              1) In corso ordine congiunto GE-MI a Selex per BB (40 kEuro)
                                         + residuo ~12 kEuro per lavorazione wafer 12’’
                              2) In attesa di riattivazione convenzione per ordine a FBK
                              3) Include contributo 2016 a Baby Demo
G.-F. Dalla Betta                                               Feb. 6, 2017

                               RD_FASE2: Assegnazioni 2015
          A3vità Descrizione                                        BO     CS    GE           MI       TN     UD
                  6" Wafer procurement (SOI, wafer bonding, epi)     -      -     -            -       10.0    -
            3D
                  PicoScope 6407 Digi:zer with 1.5 GHz probes and
                  accessories.
                                                                     -      -     -            -       8.5     -

                  6" dummy wafers - test deposi:on on 6" and
                                                                     -      -     -         20.0        -      -
Funding

            BB
                  high-density bumps (150 k-bumps/chip)

                  BB for 3D sensor test                              -      -    24.0          -        -      -
                  Upgrade R/O Systems                                -     2.0   2.0          2.0       -     2.0
           MOD
                  Module assembly and irradia:on, RD on flex          -      -    10.0          -        -      -
          MM-R/O Mul: module R/O                                    15.0    -     -            -        -      -
          CO2/µCH Develop µ-channel cooling                          -      -     -         10.0        -      -

                                                                    15.0   2.0   36.0       32.0       18.5   2.0
          Total requested by ATLAS
                                                                                      105.5
G.-F. Dalla Betta                                              Feb. 6, 2017

                          RD_FASE2: Assegnazioni 2014
            2014: CSN1 funded (Feb and May) R&D Phase 2 activities for ATLAS &
            CMS inner trackers.
                  – Development of 3D and Ac:ve Edge sensors with FBK – 3 Batches (ATLAS/CMS)
                  – Bump-bonding: development of Indium bumps (6” sensors) and produce
                    modules
Funding

                  – Develop a technology for pixel detector hybridiza:on using C (dielectric) instead
                    of R (bump-bonding) coupling
                  – Comple:on of CO2 test plant (combined ATLAS / LHCb)
          Assigned on Sezione   Category     ATLAS/CMS/COMMON   Assigned   DescripVon

           Feb 2014     GE        3D             COMMON          21 000    Wafer for 3D sensors (common with CMS)

           Apr 2014     GE        3D             COMMON          44 000    3 processes at FBK: 2 commiped with MEMS3

           May 2014     GE        HV              ATLAS          13 000    HV-CMOS Hybridiza:on + 3 FE-I4B wafers

           May 2014     MI        BB              ATLAS          27 000    BB of 3D (IBL design on 6") + 3 FE-I4B wafers

           May 2014     MI      CO2/µ-CH          ATLAS          20 000    TRACI: co-funded with LHCb

                                                                125 000
Itk Layout à strip TDR
                             One layout for strip; two concepts for pixel.
General ITk

                           Strip

                                                 Pixel

              08/05/2015                    Roadmap to Layout Workshop       26
The ITK Pixel detector: FullyInclined

                  Outer Barrel
General ITk

                                                 End cap

                                                 Innermost: Barrel + endcap

                      Same Endcap in both layouts, optimized for the Extended
                                            27
The ITK Pixel detector: Extended

                  Outer Barrel
General ITk

                                                 End cap

                                                 Innermost: Barrel + endcap

                      Same Endcap in both layouts, optimized for the Extended
                                            28
performance
General ITk

                            29
Surfaces
General ITk

              Una Endcap à 3.3 m2 ma in processo di ottimizzazione, si potrebbe ridurre
              del 30%
              Il Pixel detector oggi e’ 1.9 m2
Bump-bonding: Selex à Leonardo
               ü Requirements/challenges:
                   • 5x bump density of current IBL à 120 k-bumps/chip FEI4 size
                        • Optimize the process on dummies (produced by FBK), studying bump height, size
                          and the process parameters as pressure and temperature.
                        • Visual, mechanical and electrical test of the parts and assemblies.

                   • Bump deposition on 12-inch electronics and 8-inch sensors wafers (was 8”
Bump Bonding

                     and 6”)
                        • Optimize the process on dummy supports
                        • Wafers and deposition masks procured: test uniformity of bumps deposition.

                   • Handling of thin electronics (100 µm has been achieved for few FEI4 test
                     modules).
                        • Indium bumps have an easier process that does not need temporary support
                          wafer à competitive for innermost layers

                   • 10x total surface (14-18 m2 vs current pixel of 1.7):
                        • Need to optimize production flows and reduce bottle-necks as Flip-chip à
                          outsourcing ?

               ü We are working with Leonardo for the R&D phase and to qualify it as vendor.
                                                                                                       31
Bump Bonding
Bump Bonding
Bump-bonding@Leonardo: resistive chains
               ü Very promising results from first resistive chain tests on 6”:
                   •   Bumps resistivity as expected
                   •   No open among 64k bumps (3 chips)
                   •   No indication of shorts (either by X-rays or R measurement)
                   •   Mechanical tests with thermal cycles on module-like structure are fine.
                       Flip-chip planarity needs to be improved.
Bump Bonding

                   •

               ü Next steps:
                   • Resistive chain QA with 12” wafers
                   • … until high pitch density is available with real sensors/RD53A

                                                                                                 34
Bump-bonding@Leonardo: 12” deposition
               ü Bump deposition on 12” bare wafer (just Si, no pattern) with several
                 bumps openings under test
                  • Wafer has been visually analyzed and bumps height measured with a
                    profilometer
                      • preliminary results on bump height (~10 µm) uniformity good (~1 µm) if
                        opening is larger than 16 µm.
Bump Bonding

                      • Some problems at the photoresist lift-off due to low number of bumps
                        (bump density is nominal but only in spots uniformly distributed over the
                        wafer surface).

               ü Next steps on daisy chains:
                  • More tests needed with high bumps density all over the wafer and
                    daisy chains to measure bump resistivity.
                  • Resistive chains layout on 12” is a common layout for all the groups.
                  • In fabrication nowà BB in March.

                                                                                                    35
Bump-bonding@Leonardo: 12” deposition
Bump Bonding

                                                       36
SLIM LONGERON PROTOTYPE PRODUCTION: MANUFACTURING
                           OF ALUMINUM MOULDS

                                                      STRUCTURE ALUMINUM
                                                      MOULDS FOR:
                                                      • TEST PROTOTYPES
                                                      • FULL LENGTH
                                                         COMPONENTS

                                                      FOR THE PRODUCTION OF
                                                      THE CARBON FIBER
Mechanics

                                                      LONGERON

                        MODEL OF THE MOULD
                        INTERNAL COMPONENTS
                        WITH CRITICAL MACHINING

                                       DETAIL OF THE CARBON FILAMENTS
                                       CORNER CROSSING (THE VOLUME FIBER
                                       NEEDS TO BE MAINTAINED CONSTANT)

                                                                           37
STAINLESS STEEL
                                        MOULD

                                                               ALUMINUM MOULD
                                                               SHORT PROTOTYPE (200
                                                               mm)
Mechanics

                                                               PRODUCED IN MILANO
                                                               MECHANICAL
                                                               WORKSHOP

                                                               SENT TO CERN
                                                               TO TEST THE DE-
                                                               MOULDING PROPERTIES

            WORK IN PROGRESS: MANUFACTURING STUDIES FOR ALUMINUM FULL
            ASSEMBLY MOULD, LENGTH 400 mm

                                                                                  38
EXAMPLES OF CARBON FIBER LONGERON STRUCTURES UNDER TEST
Mechanics

                                                                      39
THERMO-MECHANICAL FEA: EVALUATION OF THE STRESS
                    IN THE CELL CRITICAL INTERFACES

                     BARREL CELL

                                                       SLIM CELL CRITICAL INTERFACES
                                  ISO-GRAPHITE BLOCK   USE OF ADVANCED MATERIALS
                                                       (NO ALL DATA ARE AVAILABLE)
                                  Sn-37Pb SOLDER       • SOLDERING (BRAZING)
                                                          BETWEEN PIPE AND
                                  PHASE-CHANGE
                                  THERMAL
                                                          COOLING BLOCK
Mechanics

                      TPG PLATE                        • PHASE-CHANGE-THERMAL
                                  INTERFACE
                                  MATERIAL                INTERFACE-MATERIAL

                      TILTED CELL
                                                       MATERIAL CTE AND YOUNG
                                                       MODULES UNDER
                                                       INVESTIGATION

                                                       FEA CALCULATION OF THE
                                                       STRESS IN THE INTERFACES

                                                                                  40
FEA STUDY: EFFECT OF THE THERMAL RADIATION
                  ON THE THERMAL FIGURE OF MERIT

                               THERMAL RADIATION EFFECT MODEL:
                               CELL IN A CLOSED CYLINDER ENVELOPE
                               TO SIMULATE THE ENERGY EXCHANGE WITH THE
                               SURROUNDING ENVIRONMENT DUE TO THE
                               INFRARED RADIATION

                               EMISSIVITY CASES STUDIED
                               • Ɛ = 1 (BLACK BODY)
                               • Ɛ = 0.5 (GRAY BODY)
Mechanics

                                                                          41
Mechanics

            EFFECT OF THE THERMAL RADIATION HEAT EXCHANGE WITH A
            SURROUNDING ENVIRONMENT AT 20 °C, FOR BOTH THE BARREL AND
            TILTED SLIM CELLS:
            THE THERMAL FIGURE OF MERIT CHANGES WITH THE COOLING
            TEMPERATURE, WITH THE EMISSIVITY OF THE FACING OBJECTS
            => INCREMENT OF THE 6 TO 9 % OF THE TFOM DUE TO THERMAL
            RADIATION EXCHANGE

                                                                        42
COLD BOX FOR SLIM CELL
                         SOLDERING/THERMAL INTERFACE
            THERMAL TEST BEFORE AND AFTER THERMAL/PRESSURE CYCLING

                                          DEDICATED COLD BOX
                                          DESIGN COMPLETED
                                          CONSTRUCTION WORK IN PROGRESS

                                          DRY-AIR FLUXED CHAMBER
                                          WITH INTERNAL DEW POINT MEASUREMENT

                                          CO2 COOLING SUPPLY
Mechanics

                                          FROM 2PACL TRACI COOLING UNIT

                                          ARMAFLEX INSULATION

                                          TEMPERATURE PROBES ATTACHED TO THE SYSTEM
                                          UNDER TEST

                                          POWER SUPPLY FOR HEATER DUMMY LOAD

                                          SLIM BARREL/TILTED CELL UNDER TEST

                                          PRE-QUALIFICATION USING A DUMMY PROTOTYPE

                                                                                43
TEST PLAN:
            1. MEASUREMENT OF THE THERMAL FIGURE OF MERIT, APPLYING POWER WITH HEATERS
                AND MEASURING THE TEMPERATURES, COOLING THE CELL USING THE CO2 SUPPLY
                FROM THE TRACI UNIT
            2. CYCLE THE PROTOTYPE (100) TIMES BETWEEN AMBIENT AND COLD TEMPERATURE (- 40
                °C)
            3. POST-MEASUREMENT OF THE THERMAL FIGURE OF MERIT AFTER THE CYCLES
Mechanics

                     THERMAL TEST                 CLIMATIC CHAMBER

                                                                                            44
CO2 TEST OF COOLING CIRCUIT CRITICAL COMPONENTS
                                                                     WITH 2PACL TRACI UNIT
                                                             SWAGELOK FLOW RESTRICTOR
                                                         CALIBRATED ORIFICE= 0,25 mm (0,01 ")
                                                  CO2 T, P (OUTLET FLOW RESTRICTOR)= -20 °C, 20 barA
                                                 3.5

                                                  3
                   ORIFICE PRESSURE DROP - bar

                                                 2.5

                                                  2

                                                 1.5
Mechanics

                                                  1

                                                 0.5

                                                  0
                                                       0   0.1   0.2   0.3       0.4     0.5        0.6     0.7   0.8   0.9

                                                                             MASS FLOW RATE - g/s

                                                            CO2 FLUID-DYNAMIC CHARACTERIZATION

      MILANO COOLING LAB.                                                                                 SOLVED THE PROBLEMS FOUND
      2PACL TRACI V.3 UNIT                                                                                IN THE PUMP: NEW GASKET TO
                                                                                                          WITHSTAND EXPLOSIVE DE-
                                                                                                          COMPRESSION

                                                                                                          UNDER FINAL COMMISSIONING
                                                                                                          AT CERN
                                                                                                                                       45
NEXT FEA TASKS:
                    ANSYS ACP FINITE ELEMENT ANALYSIS

            SLIM LONGERON FEA PERFORMANCE. RIGIDITY, VIBRATION
            FREQUNCIES, THERMO-MECANICAL STABILITY, MOUNTING
Mechanics

            FIXATIONS AND DETAIL STUDIES

             EXAMPLE OF OPTIMIZATION PROCESS FOR THE TILTED
             CELL COOLING BLOCK

                                                                 46
ITk Cooling system
              Genova is involved in the splizng box project and produc:on.
                      3D metallic printed prototype by summer :me.

                      Plant in USA15                              PP2                    PP1
ITK Cooling

                                       7

                    Chiller

                                           9
                                               Transfer line                   8
                                   Pump                                                                      7

                                           2                          3 4               5
                               1                                                                6   Staves
                                                               Splitting Box       Splitting
                                                                                   Box

              Plant →PP1
                                                                                        PP1 → Detector
              • Common Mechanics group
                                                                                        • Pixel side
                 (Lukasz Zwalinski, Paolo Petagna, … )
                                                                                               (Danilo Giugni,…)
               • DEMO & BABY DEMO
              47
Scheda Pixel_ROD

           Features
           •   7-series Xilinx® FPGAs
                 ü Kintex®7 XC7K325T for trigger and data processing
                 ü Zynq® Z020 with physical dual-core ARM Cortex-A9
           •   1 x PCIe Express interface (4GB/s towards the PC memory)
           •   16 x GTX@ 10Gb/s
                 ü 1 x 10-Gb/s link (GBTx)
           •   1 x HPC (400-pin) HS (Half pair BOC-ROD)
Read-out

           •   2 x LPC (160-pin) HS differen:al lines

           Man Power (anyone Welcome!!)
           • INFN (Lab. Elepronica)
               • G. Balbi, D. Falchieri, G. Pellegrini
               • DIFA: A. Gabrielli + studen:
                    • G. D’amen (XXX PhD 12-2017)
                    • N. Giangiacomi (XXXI PhD 12-2018)
                    • F. Alfonsi (Magistrale 06-17)
                    • C. Pre: (Magistrale 03-17)
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