Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki

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Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Pixel detector R&D
                             for CLIC
                VCI2019 – The 15th Vienna Conference on Instrumentation

                                 Dominik Dannheim (CERN)
                            on behalf of the CLICdp collaboration

February 18, 2019                       Pixel detector R&D for CLIC       1
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Outline
   • CLIC accelerator and detector, requirements

   • Sensor and readout technologies for vertex/tracker

   • Simulation Framework

   • Detector Integration

   • Conclusions

February 18, 2019            Pixel detector R&D for CLIC   2
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
CLIC accelerator and detector
                                                               Possible staged CLIC implementation
• CLIC (Compact LInear Collider):
  linear e+e- collider concept for post HL-LHC phase
• √s from few hundred GeV up to 3 TeV
  (two-beam acceleration with ~100 MV/m)
• Precision and discovery physics at the TeV scale
• Detector and physics studies within the
  CLICdp collaboration of 30 institutes

                                 CLIC detector model

                                                                      CLICdp collaboration institutes
                                                                              CLICdp collaboration
            12.8 m

  February 19, 2018                     Silicon Pixel R&D for CLIC                                      3
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Experimental conditions at CLIC

• CLIC operates with bunch trains, 50 Hz repetition rate                     Not to scale !     20 ms
à Low duty cycle
à Trigger-less readout between trains
à Allows for power-pulsed operation of detector,                 CLIC
   to reduce average power consumption                           bunch structure
                                                                                               156 ns
• Collisions within 156 ns bunch trains                                Very small bunches:
• High E-fields lead to Beamstrahlung                                  40 nm (x) x 1 nm (y) x 44 μm (z)
à High rates of beam-induced background particles                      (at 3 TeV)
à Drives detector design (layout, granularity, timing)

                                              Main backgrounds in detector:

                                                 • Incoherent e+e- pairs
                                                    • 19k particles / bunch train at 3 TeV
                                                    • Constrains beam pipe radius, granularity

                                                 • ! ! àhadrons events
                                                   • 17k particles / bunch train at 3 TeV
                                                   • Constrains granularity, layout, impacts physics
CLICdp-Note-2018-005
   February 19, 2018                      Silicon Pixel R&D for CLIC                                      4
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
CLIC vertex- and tracking detector requirements

Vertex detector:                                               Vertex-detector simulation geometry
• efficient tagging of heavy quarks through precise
  determination of displaced vertices:
  à good single point resolution: σSP~3 μm
    à small pixels ⪅ 25x25 μm2, analog readout
  à low material budget: ⪅ 0.2% X0 / layer
    à low-power ASICs + air cooling (~50 mW/cm2)                                    260 mm
                                                                                               0.84 m2
Tracker:
• Good momentum resolution: σ(pT) / pT2 ~ 2 x 10-5 GeV-1
  à 7 μm single-point resolution (~25-50 μm pitch in Rφ)
                                                                      Tracker simulation geometry
  à many layers, large outer radius
  à ~1-2% X0 per layer
    à low-mass supports + services
Both:
• 20 ms gaps between CLIC bunch trains
  à trigger-less readout, pulsed powering                                                       137 m2
• few % max. occupancy from beam backgrounds
  à sets inner radius and limits cell sizes
  à time stamping with ~5 ns accuracy
    à depleted sensors (high resistivity / high voltage)
• moderate radiation exposure (~104 below LHC!):
   • NIEL: < 1011 neq/cm2/y
   • TID: < 1 kGy / year
February 18, 2019                             Pixel detector R&D for CLIC                                5
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
CLIC pixel-detector R&D
                                               Sensor + readout technologies
 Sensor + readout technology              Currently considered for                                                      Beam test
                        Summary and outlook
 Bump-bonded Hybrid planar sensors                                        Vertex
                    Prototypes
 Capacitively coupled HV-CMOS  of sensors
                                  various integrated technologies
                                                           Vertexunder investigation for the CLIC tracker:
 Monolithic HV-CMOS  sensorsHV-CMOS:
                 Integrated                                              Tracker
 Monolithic HR-CMOS -sensor
                       MuPix and ATLASpix integrated in CLICdp Timepix3 telescope
                                                            Tracker
 Monolithic SOI sensors
                           -   Proof of principle of fully integrated elongated pixel design in HV-CMOS
                                                                      Vertex, Tracker               7 Timepix3
                                                                                                               process
                                                                                                                        Cracow SOI DUT C3PD+CLICpix2
                                                                                                                                                       Caribou r/o
                                                                                                                                                       board
                                                                                                        telescope planes               assembly

                     SOI HR-CMOS:
 CLICpix + 50 μm sensor   C3PD+CLICpix2 glue ass. ATLASPIX HV-CMOS INVESTIGATOR HR-CMOS                                         Cracow SOI
                        - Test beam studies of various pixel layouts and substrates
                           -   Good performance of investigated Cracow design for 500 μm thick
                               prototypes
                           -   Further studies with thinner prototypes to evaluate performance w.r.t.
                               requirements for CLIC tracker
                                                                                                                         SOI test chip
                        Integrated HR-CMOS
                        - Test beam and simulation studies of two different
       Simulation/Characterisation                                       Detector   integration
                                                                            submissions
                           - Promising
                          CaRIBOu                Cooling of 50 μm thin
                                  DAQanalogue performance              prototype supports
                                                                    Light-weight                             Detector
                                                                                                             assembly
                               (25 μm thin epitaxial layer) w.r.t. requirements for CLIC tracker:

      Allpix2 sim.              -   Efficiency > 99 %, spatial resolution down to 3.5 μm, timing
                                    resolution ~ 5 ns (28 μm pitch)
                       Fully integrated chip for the CLIC tracker:                                    Investigator HR test chip
  •     Challenging requirements       lead to extensive detector R&D program
  •                        -  Studied HR CMOS technology used in next phase of R&D to design a fully integrated
        ~10 institutes active in vertex/tracker R&D
  •                           prototypeALICE,
        Collaboration with ATLAS,       chip for the CLIC Mu3e,
                                                  LHCb,   tracker AIDA-2020
                                                                                                                                                                p. 17/17

February 18, 2019                                        Pixel detector R&D for CLIC                                                                                 6
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Sensor and readout R&D

  Hybrid planar sensors      ELAD planar sensors                  CCPD sensors

                                       Hybrid detectors:
                                       • Factorise r/o and sensor R&D
                                       • Smallest feature-size ASICs
                                       • Advanced sensor concepts
      SOI CMOS sensors                 • Small pixels, highest performance à for inner layers

                                                                  Monolithic CMOS sensors:
                                                                  • Lowest material budget
                                                                  • Medium feature-size
                                                                  • Simplified construction
                                                                    à for large-area tracker
  Large Fill-Factor                Small Fill-Factor              • Recent developments target
  CMOS sensors                     CMOS sensors
                                                                    also inner layers

February 18, 2019                   Pixel detector R&D for CLIC                                  7
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Thin hybrid planar pixel detectors
                                                                           Hybrid pixel detector
 •   Planar pixel sensors bump-bonded to r/o ASICs
 •   Considered for vertex detector

 •   Comprehensive thin-sensor studies with slim-edge
     and active-edge sensors (50-500 μm thickness)
     on Timepix/Timepix3 readout ASICs (55 μm pitch)

     Timepix with 50 μm active-edge sensor
                                              Timepix3 with 300 μm active-edge sensor

                      14 mm

                50 μm sensor

      700 μm Timepix

February 18, 2019                            Pixel detector R&D for CLIC                           8
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Thin hybrid planar pixel detectors
                                                                        Hybrid pixel detector
 •   Planar pixel sensors bump-bonded to r/o ASICs
 •   Considered for vertex detector

 •   Comprehensive thin-sensor studies with slim-edge
     and active-edge sensors (50-500 μm thickness)
     on Timepix/Timepix3 readout ASICs (55 μm pitch)

       Efficiency vs. det. threshold     Cluster sizes vs. thickness           Track residuals vs. thickness

        CLICdp

 •   ~100% efficiency down to 50 μm thickness (up to cut edge)
 •   Low fraction of 2-hit clusters limits achievable resolution                          CLICdp-Note-2016-001
     à Not enough charge sharing in ultra-thin sensors                                    DISS. ETH NO. 24216

February 18, 2019                         Pixel detector R&D for CLIC                                          9
Pixel detector R&D for CLIC - VCI2019 - The 15th Vienna Conference on Instrumentation - CERN TWiki
Fine-pitch hybrid detectors
 •   CLICpix/CLICpix2 r/o ASICs with in-pixel                                  CLICpix with 50 μm planar sensor
     time (10 ns binning) and energy (4-5 bit) measurement
 •   25x25 μm2 pitch
 •   Implemented in 65 nm CMOS process
                                                                                                 m   m
 •   Single-chip bump-bonding with 50-200 μm thin sensors                                    1.6
     à challenging; process optimization ongoing
     Indium bumps on CLICpix ASIC and Micron sensor (SLAC)

                                                                                  CLICpix2+FBK active-edge sensor
                                                                                  Sr-90 hit map

                                                                                     7 unconnected channels
SnAg bumps on CLICpix2 (IZM)    Advacam sensor on CLICpix2 (IZM)                     2 shorts

February 18, 2019                                Pixel detector R&D for CLIC                                        10
CLICpix + planar sensor test-beam results
       Cluster
        Cluster
         ´103
               size, 50 μm
                size 50 µmsensor
                           sensor                  Residuals 50 μm sensor
      150                       CLICdp
                               Work in                                                For 50 μm sensor thickness:
                               Progress
      100                                                                             Mostly single-pixel cluster
                             mean=1.1                                                 à No charge interpolation
       50                                                                             à Resolution limited by
                                                                                      pixel pitch
        0
            1     2      3      4         5
                        Cluster size in y

            Cluster size 200 μm sensor             Residuals 200 μm sensor

                                                                                      For 200 μm sensor thickness:
                                                     CLICdp
C               14. 09. 2017                  10                                      Mostly two-pixel cluster
                                                                                      à Charge interpolation
                                                                                      à Resolution close to
                                                                                        target value of 3 μm
                                                                                      à But too thick for material-
                                                                                        budget target 0.2%X0/layer

                                                                                                JINST 12 (2017) C06006

    February 18, 2019                                   Pixel detector R&D for CLIC                                      11
Enhanced Lateral Drift sensors
                                                                                                                                  Hendrik Jans

                                              η- function for 4 units cel
     04.10.2017 | Anastasiia Velyka | Clic Vertex                                             2
 • Position resolution in very thin sensors so far limited to                 > Number
                                                                       04.10.2017

   ~pixel pitch / √12 (almost no charge sharing)                                       ELADof    collected
                                                                                               sensor layout charge                      for
                                                                                    Q1Imp                   Q2Imp
 à Enhanced LAteral Drift sensors (ELAD) Patent DE102015116270B4
 • Deep implantations to alter the electric field
   à lateral spread of charges during drift, cluster size ~2
                                                                                               p    n    p
   à improved resolution for same pitch
 • Challenges:
                                                                                          p         n        p
       • Complex production process, adds cost
       • Have to avoid low-field regions (recombination)                              p             n           p
 • TCAD and MC simulations: Implantation process,
   Sensor performance for MIPs
   à expect significantly improved position resolution vs. standard sensor                         x
                                                                                  MIP position
 • First production in 2019: generic test structures, strips
   and test sensors with Timepix footprint (55 μm pitch)                              Q1                       Q2
                                                               à Talk by H. Jansen on Thursday in Semicond. session:
                                                                        Bulk engineering for enhanced lateral drift sensors

    TCAD charge density simulation                  Collected charge vs. MIP position          Allpix2 MC simulation of residuals

                                                                                                                                            >

                                                                                         MIP position          x
                                                                                   17.11.2017 | Anastasiia Velyka | Clic Vertex

February 18, 2019                                    Pixel detector R&D for CLIC                                                       12
2
5x25DmCapacitively
       2pi
         tch coupled HV-CMOS sensors
 nt
  s  pe    r for   me     d
   • Active sensors in 180 nm High-Voltage (HV) CMOS process,                  Capacitively Coupled Pixel Detector
        large fill factor: electronics in charge-collection well

 ,
 C~8Dm• Amplification in sensor, capacitive coupling to r/o ASICs
     SPà thin glue layer replaces costly small-pitch bump bonds
      • High-resistivity substrates (up to 1kΩcm) to increase depletion
      • Considered for vertex detector
of
 ca  p   a c it iv  e  co  u p l i n g
  • Active sensors (CCPDv3, C3PD), 25x25 μm pitch     2

      • Glue assemblies with CLICpix/CLICpix2

       Cross section through C3PD/CLICpix2 glue assembly                        C3PD/CLICpix2 glue assembly

                                                      CL
                                                       ICpi
                                                          x2

                              25⇡m
on                                                            C3
                                                               PD
                                                                                     NIM A 823 (2016) 1-8;
                                                                                     JINST 12 P09012 (2017)

    February 18, 2019                            Pixel detector R&D for CLIC                                   13
Capacitively coupled HV-CMOS sensors

 • Active sensors in 180 nm High-Voltage (HV) CMOS process,               Capacitively Coupled Pixel Detector
   large fill factor: electronics in charge-collection well
 • Amplification in sensor, capacitive coupling to r/o ASICs
   à thin glue layer replaces costly small-pitch bump bonds
 • High-resistivity substrates (up to 1kΩcm) to increase depletion
 • Considered for vertex detector

 • Active sensors (CCPDv3, C3PD), 25x25 μm2 pitch
 • Glue assemblies with CLICpix/CLICpix2

 • ~100% efficiency, σSP~6 μm, σt~7 ns
 • Finite-element simulation of capacitive coupling
 • Challenges: glue uniformity / alignment, calibration

     CCPDv3/CLICpix efficiency            CCPDv3/CLICpix residuals             C3PD/CLICpix2 time residuals

                                            σSP~6 μm

                    Threshold ~1200 e-                    Threshold
                                                          ~1200 e-

February 18, 2019                           Pixel detector R&D for CLIC                                       14
Monolithic HV-CMOS sensors
    • Active depleted HV-CMOS sensors with fully integrated readout
    • Considered for CLIC tracker                                            ATLASpix HV-CMOS sensor

                                 180 nm HV-CMOS process

                                                                         Common MuPix+ATLASpix reticle
• ATLASpix_Simple sensors in 180 nm HV-CMOS process:
   • Designed for ATLAS ITK upgrade
   • Targeting also CLIC tracker requirements
   • 130 x 40 μm2 pitch
   • 25 x 400 pixels
   • Data-driven column-drain readout
   • 12.5 ns time bins
   • Beam tests in CLICdp Timepix3 telescope
      (1 ns reference timing)             10.1016/j.nima.2018.06.060

February 18, 2019                          Pixel detector R&D for CLIC                              15
ATLASpix_Simple test-beam results
                                                                       Efficiency

  • 99.7% efficiency
  • Time resolution: ~7 ns (RMS)
  • Spatial resolution: σSP~13 μm
     (almost no charge sharing)
     à worse than required 7 μm
  à Plan for CLIC version with adapted
  footprint: ~200 x 25 μm2 pitch

          Timing residual
                                             Residual in column direction           Residual in row direction

                            RMS~7 ns

                                                  Reconstruction using: https://gitlab.cern.ch/corryvreckan/corryvreckan
February 18, 2019                        Pixel detector R&D for CLIC                                                   16
Monolithic HR-CMOS sensors
• Integrated CMOS sensors on High-Resistivity (HR) substrate                                                                   HR-CMOS process
• Small collection electrode separated from electronics
  à small capacitance, high signal/noise
                                à More on this process in plenary talk on Friday by L. Musa:
                                CMOS Active Pixel Sensors for High Energy Physics
• Considered for CLIC tracker
• Tests with Investigator analog test chip (external r/o)
  in 180 nm modified HR-CMOS imaging process
  (ALICE development), various test matrices
• For 28x28 μm2:
  99.3% efficiency (
CLICTD monolithic HR-CMOS sensor
                                                                                                 Pixel segmentation
•   Promising results obtained with Investigator test chip lead to
    design of fully integrated monolithic CLICTD sensor for CLIC tracker:
      • New concept of pixel segmentation in small collection diodes,
         to maintain fast charge collection while reducing digital logic:                  CLICTD layout
         30 x 300 μm2 pixel size, 30 x 37.5 μm2 diode size
      • TCAD geometry and process optimization

                                                                                    5 mm
      • Process modification for faster charge collection
      • Time (10 ns bins) and charge (5 bit) measurement per pixel
      • Hit-pattern readout, power-pulsing features
•   Chip submitted for production in 2 process variants (February 2019)
                                                                                                    5 mm
                                                                CLICdp-Conf-2018-008
                    Continuous deep n layer
                                                       TCAD optimisation:
                                                       Effect of sensor implant
                                                       design on charge sharing

                                                  Continuous n layer    Segmented in R/phi + z     Segmented in z
                    Segmented deep n layer

                                                  e- density
                                                  after 3 ns

February 18, 2019                             Pixel detector R&D for CLIC                                             18
Monolithic SOI sensors
  •   Silicon-On-Insulator (SOI): r/o electronics on thin low-resistivity electronics wafer,
      separated from high-resistivity sensor wafer by buried insulation oxide layer
                                                                                       SOI pixel detector
  •   Considered for vertex and tracker

 • Cracow SOI test chip in 200 nm LAPIS SOI process,
mmary    and outlook
   with various geometries and technology parameters:
     >=30x30 μm2 pitch, single SOI and double SOI, rolling shutter r/o
  • Test                                            2 pitch
otypes ofresults
          variousforintegrated
                     300, 500 μm thickness, 30x30
                               technologies       μminvestigation
                                              under                  for the CLIC tracker:
     >99% efficiency, σSP~2-5 μm
rated HV-CMOS:
 MuPix and ATLASpix integrated in CLICdp Timepix3 telescope
 Proof of principle of fully integrated elongated pixel design in HV-CMOS process
       Signal/Noise for 300 μm sensor          Resolution for 300 μm sensor            Cracow SOI test chip
HR-CMOS:
                                                               CLICdp
 Test beamCLICdp
          studies of various pixel layouts and substrates
 Good performance of investigated Cracow design for 500 μm thick
 prototypes
 Further studies with thinner prototypes to evaluate performance w.r.t.
 requirements for CLIC tracker
                                                                                    SOI test chip
rated HR-CMOS
                                                                                      NIMA 901 (2018) 173–179
 Test beam and simulation studies of two different submissions
 February 18, 2019                               Pixel detector R&D for CLIC                                    19
CLIPS monolithic SOI sensor
                                                                                       CLIPS layout

  • CLIPS: New AGH SOI chip targeted to Linear Collider vertex detectors:
    • 3 test matrices with 64x64 pixels, 20x20 μm2 pitch
    • Targets spatial resolution
Allpix2 simulation framework
                                                                                      Spatial residuals in test beam
 •    Complex sensors (ELAD, HR/HV-CMOS) require detailed simulations
 •    TCAD: device modeling, self-consistent charge propagation, slow                         CLICdp
 •    Geant4: MC simulation of charge deposition and full detector setup,
      stochastic effects (Landau fluct.), no detailed device modeling, fast
 Allpix2 simulation framework for tracking detectors
 •    Simulates full chain from incident radiation to digitized hits                           50 μm Timepix3 sensor
 •    Combination of tools:                                                                    in CLICdp telescope
        •   Full Geant4 simulation of charge deposition
        •   Fast charge propagation using drift-diffusion model
        •   Import electric fields from TCAD
 •    Validated with test-beam data (planar, HV-CMOS, HR-CMOS sensors)
                                                                                        Cluster size in HR-CMOS sensor
                                          MIP in underdepleted HV-CMOS pixel sensor

Beam telescope with tilted DUT

                                                                                              CLICdp

NIMA 901 (2018) 164      https://cern.ch/allpix-squared

February 18, 2019                                Pixel detector R&D for CLIC                                             21
Detector integration
          Through-Silicon Via           Power-pulsing mockup
                                                                                             Vertex-detector services

                                                          Outer barrel tracker support structure
       Vertex thermal stave dummy
                                                                                                              Assembly scenario
                                                                                                              tracker discs

         CFRP support prototypes
                                                                  Air-flow cooling mockup and simulation
                                26 mm

    Calculations, simulations, prototyping à confirm feasibility of detector-integration concepts
February 18, 2019                                        Pixel detector R&D for CLIC                                          22
Conclusions

  • Stringent requirements for CLIC vertex and tracking detectors
    have inspired broad and integrated technology R&D program

  • Various innovative sensor + readout technologies under study

  • Resolution target for vertex layers remains challenging

  • Monolithic pixel detectors under development for large-area tracker and vertex

  • Advanced simulation and analysis tools for detector performance optimization

  • Detector integration studies confirm feasibility of proposed detector concepts

                    Thanks to everyone who provided material for this talk!

February 18, 2019                            Pixel detector R&D for CLIC             23
Resources

                    Compact Linear Collider Portal
                    http://clic.cern/

                    CLIC input to the European Strategy for Particle Physics
                    Update 2018-2020
                    https://clic.cern/european-strategy

                    CLICdp publications on CERN Document Server
                    http://cds.cern.ch/collection/CLIC Detector and Physics Study

February 18, 2019                    Pixel detector R&D for CLIC                    24
Additional Material

February 18, 2019         Pixel detector R&D for CLIC   25
CLIC schedule
                 2013 – 2019                                             2020 – 2025                                                                 2026 – 2034
                 Development Phase                                       Preparation Phase                                                           Construction Phase
                 Development of a project plan for a                     Finalisation of implementation                                              Construction of the first CLIC
                 staged CLIC implementation in line                      parameters, preparation for                                                 accelerator stage compatible with
                 with LHC results; technical                             industrial procurement, pre-series                                          implementation of further stages;
                 developments with industry,                             and system optimisation studies,                                            construction of the experiment;
                 performance studies for accelerator                     technical proposal of the                                                   hardware commissioning
                 parts and systems, detector                             experiment, site authorisation
                 technology demonstrators

                                                       2020                                              2026                                                                                 2035
                                              Update of the European            Ready for construction                                                                         First collisions
                                            Strategy for Particle Physics

                  7 years                                                                                                         27 years

              380 GeV                                                          1.5 TeV                                                             3 TeV
                                                         Decision                                                             Decision
         · Construction                                                  · Construction                                                      · Construction
                                                         making                                                               making
           · Installation                                                  · Installation                                                      · Installation
                                Commissioning

                                                                                                         Commissioning

                                                                                                                                                                              Commissioning
                                                                                        Reconfiguration

                                                                                                                                                             Reconfiguration
                                                      380 GeV Physics                                                         1.5 TeV Physics                                                         3 TeV Physics

     0       2              4      6              8       10        12        14                16                       18         20       22         24                           26          28        30         32   34

February 18, 2019                                                                  Pixel detector R&D for CLIC                                                                                                                  26
Active-edge sensors
• Deep Reactive Ion Etching (DRIE) process (Advacam):
  • Implantation on the sensor sidewalls:
    extension of the backside electrode to the edge
  • Efficiency extends to the physical edge
    à allows for seamless tiling of sensors

        Cluster signal at the edge of 50 μm sensor                Edge efficiency 50 μm sensor

                      à Active-edge sensors fully efficient up to the cut edge

February 18, 2019                                Pixel detector R&D for CLIC                     27
DAQ
•   Lab and beam tests require flexible scalable DAQ
    hardware and software                                               CLICdp Timepix3 telescope in
                                                                        SPS H6 beam line
Results:
• High-rate beam telescope with Timepix3 detector planes
  (~1 MHz track rate, ≲2 μm resolution, ~1 ns time resolution)
• CaRIBOu universal readout system developed with ATLAS:
   • System-on-Chip (SoC) architecture
   • Peary DAQ software in Linux system inside FPGA core
   • Integration of CLICpix2, C3PD, ATLASpix

       CaRIBOu hardware architecture

                                                                        CaRIBOu with CLICpix2 r/o ASIC
                                                                         CLICpix2 in CaRIBOu framework

February 18, 2019                         Pixel detector R&D for CLIC                                    28
Powering
     •   Powering concept has major impact on material budget and heat load
     •   Small duty cycle of CLIC machine (
Cooling
 •   Vertex detector and tracker require cooling systems with sufficient cooling
     power and minimal impact on physics performance (material budget,
     vibrations, constraints for detector layout)

 •   Simulations and prototype measurements for vertex air cooling concept
     with spiral-shaped disc layers
     à ~50 mW/cm2 feasible
 •   Water cooling concept for tracker                     1:1 scale air cooling thermal test setup
     (copied from ALICE ITS upgrade,
     no dedicated CLIC studies)
     à ~150 mW/cm2 feasible

                                                                                           60 cm

                                                             Mass Flow: 20.1 g/s
                                                             Average velocity:
                                                                                   Finite-element simulation
                                                             @ inlet: 11.0 m/s     of air velocity
                                                             @ z=0: 5.2 m/s
                                                             @ outlet: 6.3 m/s

                                                                                               CLICdp-Note-2016-002
February 18, 2019                            Pixel detector R&D for CLIC                                          30
Mechanical integration
    Material budget allows for only ~0.1%X0 from cables+supports in vertex region,
Thin-sensors with Timepix(3) r/o
                                                              Micron/IZM assembly: 100 μm slim-edge
Planar sensor assemblies with 55 μm pitch                     sensor on 100 μm Timepix ASIC
• Goal: test feasibility of ultra-thin sensors
  with minimized inactive regions
• Producers: Micron and Advacam/VTT
• Readout: Timepix / Timepix3
• 50-500 μm sensor,100-700 μm ASIC thickness
• slim-edge and active-edge layouts                                           14 mm
• Test-beam campaigns at DESY and CERN PS/SPS
• ultimate goal: 50 μm sensors on 50 μm ASICs
   50 μm silicon wafer
                             Advacam active-edge sensor         Advacam assembly w. 50 μm active-
                                                                edge sensor  14 mm
                              floating
                              guard ring

                              active
                              edge         100 μm

                                                                         50 μm sensor

                                            55 μm

                                                                 700 μm Timepix
February 18, 2019                          Pixel detector R&D for CLIC                              32
CLICpix2 r/o ASIC
  • New CLICpix2 in same 65 nm process as CLICpix:                                                CLICpix2
    • Increased matrix size to 128 ⨉ 128 pixels
    • Longer counters for charge (5-bit) and timing (8-bit)
      measurements
    • Improved noise isolation and removal of cross-talk

                                                                                          4 mm
      issue observed in first CLICpix
    • More sophisticated I/O with parallel column readout
      and 8/10 bit encoding
    • Integrated test pulse DACs and band gap

  • Test results with chips from Multi-Project-Wafer-Run
  • Same chip on RD53 wafer, received in Dec 2017
    (change from 5+1 to 7+1 metal layers)                   CLICpix2 analog F/E specifications
                                                 Parameter                 Value
    à access to full wafers for bump-bonding Power dissipation             ≤ 12 µW

    process development                          Area                      ≤ 12.5x25 µm                         2

                                                        Input charge, Qin                        nominal 4 ke-, max. 40 ke-
                                                        Minimum threshold, Qth,min               ≤ 600 e-
                                                        Equivalent input-referred noise, Qn,in   ≤ 70 e-
                                                        ToT dynamic range                        ≥ 40 ke-
                                                        ToA accuracy                             ≤ 10 ns
                                                        Total ionizing dose (for 10 yr)          1 Mrad
                                                        Input charge types                       e-, h+
                                                        Testability                              in-pixel test pulse (i.e. Qtest) injection

February 18, 2019                         Pixel detector R&D for CLIC                                                                         33
C3PD+CLICpix2 time resolution
            •  Track time resolution of CLICdp Timepix3 telescope
INVESTIGATOR resolution and efficiency

                                      Impact of charge sharing on spatial resolution and efficiency for standard
                                      & modified process (pitch of 28 μm, bias voltage of -6 V):

                         X cluster size vs. threshold:                                                X resolution vs. threshold:                                                Efficiency vs. threshold:

                                                                 X spatial resolution [µm]

                                                                                                                                                           Efficency
X cluster size

                     2                                                                       8       Resolution = RMS± 20 µm

                                          Modified                                                   Telescope resolution not unfolded
                                                                                                                                                                         1
                 1.8                      Standard                                           7

                                                                                             6                                                                   0.95
                 1.6                      CLICdp                                                                                         CLICdp                                  CLICdp
                                          preliminary                                        5                                           preliminary                             preliminary
                 1.4                                                                                                                                                   0.9
                                                                                                                                     Modified                                                  Modified
                 1.2                                                                         4
                                                                                                                                     Standard                    0.85                          Standard

                     1                                                                       3
                      0    100 200 300 400 500                                                   0     100 200 300 400 500                                                   0       200       400        600
                                                         -                                                                                             -                                                        -
                                        Threshold [e ]                                                                             Threshold [e ]                                              Threshold [e ]

                 •        More charge sharing for                                            •         Better spatial resolution
                                                                                                                                                                         •       Earlier drop of
                                                                                                                                                                                 efficiency (at lower
                          standard process                                                             for standard process
                                                                                                                                                                                 thresholds) for standard
                                                                                                       down to ~ 3.5 μm
             •           Expected from non depleted                                                                                                                              process
                         regions (diffusion)
                                                     Efficiency & spatial resolution for both process variants within
                                                     requirements for CLIC tracker.

February 18, 2019                                                                                     Pixel detector R&D for CLIC                                                                                   35
INVESTIGATOR timing

                                   Timing resolution for standard & modified process (pitch
                                   of 28 μm, bias voltage of - 6 V):

                     Standard process:                                               Modified process:

                                                                   # [norm.]
   # [norm.]

               0.3     σ Gauss ~ 6 ns                                     0.25          σ Gauss ~ 5 ns

                                                                               0.2
               0.2
                                                                          0.15

                                                                               0.1
               0.1
                       CLICdp                                                           CLICdp
                       Work in                                            0.05          Work in
                       progress                                                         progress

                0                                      ×10-6                                                           ×10-6
                -0.1       -0.05        0   0.05     0.1                         -0.1       -0.05        0   0.05    0.1
                            Hit time - track time [s]                                         Hit time - track time [s]

                     Comparable timing resolution for both processes
                     (Readout sampling frequency of 65 MHz limits achievable precision)

February 18, 2019                                     Pixel detector R&D for CLIC                                              36
CLICTD monolithic HR-CMOS tracker chip
    Good performance of studied 180 nm HR-CMOS technology with respect to requirements of CLIC tracker
    à Technology used for ongoing design of a fully integrated chip for the CLIC tracker

   CLIC Tracker Detector (CLICTD) – monolithic HR-CMOS sensor with 30 μm x 300 μm pixels

   Segmented macro-pixel structures to maintain advantages of small collection diode (prompt and fully efficient
   charge collection) while reducing digital logic:

   Discriminator output of
   8 collection diodes
   combined in logical OR

    Output of logical OR passed to digital circuitry:
    • Simultaneous 8-bit ToA and 5-bit ToT measurements
    •   Expect σSP~7 μm in short direction (charge sharing)
    •   Hit bit pattern à maintain good resolution also in long direction
    •   100 MHz clock to achieve 10 ns time binning

February 18, 2019                               Pixel detector R&D for CLIC                                   37
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