Solid State Sensors to shape the future of Medical Imaging - From Technologies to Markets - EPRISE
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YOLE DEVELOPPEMENT – FIELDS OF EXPERTISE Life Sciences Semiconductor Semiconductor & Healthcare & Software & Software o Microfluidics o Package,Assembly & Substrates o BioMEMS & Medical Microsystems o Semiconductor Manufacturing o Inkjet and accurate dispensing o Memory o Solid-State Medical Imaging & BioPhotonics o Software & Computing o BioTechnologies Life Photonics, Sciences & Sensing Healthcare & Display Power Photonics, & Wireless Sensing & Display o RF Devices & Technologies o Solid-State Lighting o Compound Semiconductors & Emerging Materials Power & Wireless o Display o Power Electronics o MEMS, Sensors & Actuators o Batteries & Energy Management o Imaging o Photonics & Optoelectronics 3
LS&H: FIELD OF EXPERTISE 5 Activities Lab-on-a-chip bioMEMS Inkjet Medical Imaging Biotechnologies / Microfluidics /Microsensors / biophotonics ©2019 | www.yole.fr | X-ray technology trends 4
LS&H TECHNOLOGIES & RELATED APPLICATIONS Solid state Medical Imaging & biophotonics Courtesy of Pyxalis LS&H Division X-ray flat panels Endoscopy cameras Ultrasound technology MRI Microscopy Life Sciences Cameras Silicon photonics … 5
HISTORICAL SYNERGIES Technology/product roadmap TFT IGZO - flexible CdTe-based technology Semiconductor pMUT technologies CCD sensor Octogonal and round image sensor SiPM CMOS sensor TODAY 2022 Analog x-ray films 2017 PMT tubes 1995 1980 Chip-to-the-tip 1970 endoscope Tiny camera endoscopy First PET/CT scans - GE 1930 Ultraportable ultrasound First fiberoptic endoscope Digital imaging World’s first developed MRI X-ray discovered First developed CT scanner 1895 X-ray machine - 1920 First intra-oral detector CdTe detection Photon-counting CT scanner 7
WHAT IS SOLID-STATE? Technology transformation Incoming wave Scintillation Sensor Electronics focusing Gamma ray, x-ray, Scintillation Incoming wave Sensor Electronics In our report, visible focusing Tube « solid-state » refers to electronic components, devices, and Ultrasound, x-ray systems based Crystal on semiconductor and IC processes Solid-state sensors, CIS, MEMS, etc. ©2019 | www.yole.fr | X-ray technology trends 8
DIGITAL X-RAY MARKET A succession of disruptive innovations A history What’s next ? spanning 120 years 10
DIGITAL X-RAY DETECTORS - TECHNOLOGY LANDSCAPE CCD image-intensified aSi FPD aSe CMOS FPD IGZO FPD Photon counting camera Detec- tion Indirect Indirect Direct Indirect Indirect Direct Field electrode Dielectric layer Main components CdTe a-Selenium layer photoconductor Charge electrode Indium bump electron electrons s + + • Electron mobility Advantages • Very large panels • High resolution • High resolution • High resolution • Higher • High speed + possible • Manufacturability • Low noise absorption • High resolution : standard TFT • Multi-energy CT • Economical Fab Drawbacks - • Bulky • Low resolution • Expensive • Limited size • Supply chain not • Expensive • Low field of view • Slow solution • Expensive ready yet solution Current technologies Emerging technologies 11
TECHNOLOGIES POSITIONING General Large >100µm radiography Low < 5Hz Pixel Frame 3D dental and Mammography rate size mammography fluoroscopy/ High Small dynamic imaging >20Hz < 40µm Dynamic imaging fluoroscopy Small Medium Large Detector size 12
TECHNOLOGIES POSITIONING General Large >100µm radiography Low < 5Hz Pixel Frame 3D dental and Mammography rate size mammography fluoroscopy/ High Small dynamic imaging >20Hz < 40µm Dynamic imaging fluoroscopy a-Si FPD Small Medium Large Detector size A-Se FPD CMOS • Each technology dominates in a specific medical application. FPD • Mammography and dental are moving towards a 3D tomography approach favoring CMOS flat panel CCD • Fluoroscopy (real-time imaging) benefits from CMOS thanks to Small Medium Large lower dose and speed. Detector size 13
TECHNOLOGIES POSITIONING CMOS flat-panel detectors are positioned in applications requiring medium-size General panels AND high resolution OR high speed Large >100µm radiography Low < 5Hz Pixel Frame 3D dental and Mammography rate size mammography fluoroscopy/ High Small dynamic imaging >20Hz < 40µm Dynamic imaging fluoroscopy a-Si FPD Small Medium Large Detector size A-Se FPD CMOS • Each technology dominates in a specific medical application. FPD • Mammography and dental are moving towards a 3D tomography approach favoring CMOS flat panel display CCD • Fluoroscopy (real-time imaging) benefits from CMOS thanks to Small Medium Large lower dose and speed. Detector size 14
TECHNOLOGY TRENDS New technologies coming from the display world : IGZO and LTPS Performance • a-Si remains the dominant technology for entry Improving performance level displays for both small and large displays “The (process, new materials, new structures) Samsung Galaxy S6 ideal TFT (577ppi) Material” LTPS High End smartphone AMOLED • LTPS (low temperature polycrystalline silicon) is (high PPI), LCD rapidly increasing market shares for high end Decreasing cost IGZO, mobile displays. Other High end AMOLED TV (4K, >240Hz refresh) Metal LG OLED TV Oxide (2k1k, 4k2k) AMOLED TV • IGZO (indium gallium zinc oxide) have long been seen as a potential ideal “high performance/low-cost” TFT technology. AM TFT LCD (smartphone, laptop, TVs…) a-Si E-Paper Cost From Yole report “Organic TFT 2016: Flexible Displays and other Applications” 15
TECHNOLOGY TRENDS New technologies coming from the display world : IGZO and LTPS IGZO and LPTS are technologies coming from the consumer market : mobile phones, tablets,TVs, etc. IGZO key features: LPTS key features: • Electron mobility (20-50 times better than • Electron mobility (100 times better than aSi) aSi) • High resolution and high pixel density IGZO is the • Higher resolution • But expensive to manufacture and difficult to next • Substrate flexibility (glass or polymer) go for large panels disruptive TFT technology in • Manufacturability : in standard TFT Fab the field of X- ray imaging Source: Sharp ©2019 | www.yole.fr | X-ray technology trends 16
DIGITAL X-RAY - TECHNOLOGY TRENDS New technologies coming from the display world : IGZO and LTPS IGZO and LPTS are technologies coming from the consumer market : mobile phones, tablets,TVs, etc. IGZO key features: LPTS key features: • Electron mobility (20-50 times better than • Electron mobility (100 times better than aSi) aSi) • High resolution and high pixel density IGZO is the • Higher resolution • But expensive to manufacture and difficult to next • Substrate flexibility (glass or polymer) go for large panels disruptive TFT technology in • Manufacturability : in standard TFT Fab the field of X- ray imaging Next big trend in X-ray imaging Source: Sharp ©2019 | www.yole.fr | X-ray technology trends 17
DIGITAL X-RAY - TECHNOLOGY TRENDS IGZO : first products available The 3131Z flat panel detector is the first Jupi 1212X is new generation FPD developed by Varex IGZO based FPD. iRay with IGZO sensor technology for real-time It is used for Surgical and Dental imaging. applications with a 100 µm pixel size. It is used for interventional procedures. Varex and iRay has IGZO FPDs used for mammography, iRay fluoroscopy and dental imaging. demonstrated their first IGZO products for X-ray imaging ©2019 | www.yole.fr | X-ray technology trends 18
DIGITAL X-RAY - TECHNOLOGY TRENDS Photon counting Source : Siemens Advantages of Photon Counting detectors in CT: • Higher spatial resolution • Lower noise • Lower dose • Spectral information available, multi- energy CT CdTe-based sensors have entered the dental market via Sirona’s products, but photon counting CT are still under development. The first commercial products should be available by 2021. Photon-counting CT scanner at the NIH’s Clinical Center 19
DIGITAL X-RAY MARKET A market segmented by end-application General radiography Computed tomography Radiography CT scan A broad applications Mammography Dental x-ray portfolio Intra-oral Interventional & surgery 3D CBCT C-arm Extra-oral 2D extra-oral panoramic Fluoroscopy ©2019 | www.yole.fr | X-ray technology trends 20
DIGITAL X-RAY IMAGING - MARKET DRIVERS Cost Dose Initial price & cost of ownership → High sensitivity detector → Detector represents a large portion of the system price Early diagnostic Exam duration → high resolution → High acquisition speed Multimodality → Versatile, portable detector: wireless, battery-powered 21
MARKET DATA AND FORECAST, BY APPLICATION Solid state sensor market 2018-2024 by application (in $M) 500 450 400 CT Scanner 350 X-ray Dynamic 300 X-ray Mammograpy Today, x-ray 250 X-Ray Static medical is 200 150 X-Ray Extraoral 3D almost exclusively 100 X-Ray Extraoral 2D based on 50 X-Ray Intraoral solid-state 0 sensors. 2018 2019 2020 2021 2022 2023 2024 • CT scanner and X-ray static applications represent the majority of sensor sales. • Mammography and interventional/surgery applications use smaller sensors, but 2016 - 2022 growth will be quite dynamic. ©2019 | www.yole.fr | X-ray technology trends 22
MARKET DATA AND FORECAST, BY TECHNOLOGY Solid state sensor market 2018-2024 by technology (in $M) 500 400 IGZO 300 Si Photodiode array The first CMOS 200 IGZO flat a-Si panels will 100 CCD be integrated as - early as 2020 2018 2019 2020 2021 2022 2023 2024 • Si photodiode array corresponds to the CT scanner market and is expected to increase with a 4,9% CAGR between 2018 and 2024. • CMOS market shares are expected to grow until 2022 but IGZO flat panels will gain market share when the technology will be available. • As a cheaper solutions with good technical features aSi will stay the main sensor technology in the field of X-ray imaging (without CT scanner). ©2019 | www.yole.fr | X-ray technology trends 23
X-RAY IMAGING: SUPPLY CHAIN Sensor design Front-end Detectors OEM Sensor design Manufacturing Packaging/ Medical assembly equipment After a wave of M&A activity the supply chain consolidation IDM or Medical Medical is now Design houses device Foundries device beginning to company company bearfruit ©2019 | www.yole.fr | X-ray technology trends 24
X-RAY MEDICAL IMAGING: SUPPLY CHAIN Sensor design Front-end Detectors OEM CMOS Asian players are coming to the market with interesting products at lower price aSi ©2019 | www.yole.fr | X-ray technology trends 25
X-RAY SENSOR TECHNOLOGY ROADMAP Single-photon counting Improved cost/performance IGZO CdTe CMOS FPD A-Se FPD IGZO a-Si FPD CMOS CdTe Toward CCD image- aSe lower dose intensified camera and more aSi information CCD 1980s 2000s 2010s 2018 2020s 2024 - Less bulky - Lower noise - Lower dose - Higher speed and resolution - Multi-spectral imaging - Improved quality - Higher integration ©2019 | www.yole.fr | X-ray technology trends 26
Focus on ultrasound technologies © 2019
ULTRASOUND TECHNOLOGY History 2017 – Butterfly probe 2016 – based on CMUT 2009 - Hitachi – Fingerprint Mappie probe sensor based based on CMUT on PMUT 1958 - Ultrasound for obstetrics 2018 1994 1960 - Metal flaw detectors Hyperphonography, first medical imaging 1960 system for diagnosis – inventor: Karl Theodore 1980 - 1st generation PMUT 1947 1994 - 1st generation CMUT Dussik, Austria 2016 – PMUT based module Langevin triplet for Sonar 1917 Quartz ultrasound generator 1794 Classical Langevin transducer Discovery of ultrasounds Discover of PZT material ©2019 | www.yole.fr | X-ray technology trends 28
PMUT AND CMUT TAKE-OFF Module Courtesy of Technology integration Butterfly Network Courtesy of Philips readiness at the readiness transducer level (assembly, manufacturing) Interest of new players through Emergence of investment and PMUT new applications acquisitions and CMUT take-off ! Confidential | Medical MEMS & Sensors 2018 | www.yole.fr | ©2018 29
DRIVERS FOR NEW APPLICATIONS IN ULTRASOUND IMAGING Drivers for new applications using ultrasound imaging Ultra-portable Miniaturization Democratization More readable systems Solid state Impact on ultrasound transducer requirements: technologies could ✓ Reduce transducer size help resolve some ✓ Reduce cost of these new ✓ Electronics integration requirements for ✓ Improve image quality ultrasound ✓ New functions to help users for diagnosis transducers 30
CMUT VS. PMUT VS. BULK PIEZO Frequency and application dependent Frequency dependent, Bulk Piezo MUT could reach higher CMUT frequencies. PMUT 1KHz 1MHz 10 MHz Lithotripsy Medical imaging Dentistry Tissue ablation - HIFU 31
PENETRATION OF CMUT/PMUT TECHNOLOGIES Ultrasound modules market data and forecasts in medical ultrasound by technology (2017-2023, in units) 400,000 350,000 300,000 In units Bulk PZT based modules 250,000 200,000 150,000 100,000 MUT based modules 50,000 - 2017 2018 2019 2020 2021 2022 2023 CAGR 2017- 2023 • There are already products on the market using CMUT technologies, such as Hitachi probes or Verasonics/Vermon, Kolo Medical and some IVUS and endoscopic products, but these are still niche markets. • The real disruption is coming first with the Butterfly Network with product available end 2018 based on a CMUT probe, and the eXo Imaging product based on a PMUT probe, but probably not available before 2020. 32
THANKS FOR YOUR ATTENTION! Some slides from this presentation have been taken from the following report: Solid State Medical Imaging Released in Jan. 2017 – More info on www.i-micronews.com 240+ slides report Ultrasound Sensing Technologies for Medical, Industrial, and Released in 2018 – More info on www.i-micronews.com 200+ slides report Contact: Marjorie Villien Email: villien@yole.fr 33
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