Live processing of momentum-resolved STEM data for first moment imaging and ptychography
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Live processing of momentum-resolved STEM data for first moment imaging and ptychography Achim Strauch1,2,∗ , Dieter Weber1,∗ , Alexander Clausen1 , Anastasiia Lesnichaia1 , Arya Bangun1 , Benjamin März1 , Feng Jiao Lyu3 , Qing Chen3 , Andreas Rosenauer4 , Rafal Dunin-Borkowski1 , and Knut Müller-Caspary1,2 1 Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich, 52425 Jülich, Germany arXiv:2106.13457v2 [physics.data-an] 17 Aug 2021 2 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany 3 Key Laboratory for the Physics and Chemistry of Nanodevices, Department of Electronics, Peking University, Beijing 100871, China 4 Institute for Solid State Physics, Universität Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany ∗ Achim Strauch and Dieter Weber contributed equally to this work and share first-authorship. Corresponding Author: Achim Strauch Abstract A reformulated implementation of single-sideband ptychography enables analysis and display of live detector data streams in 4D scanning transmission electron microscopy (STEM) using the LiberTEM open-source platform. This is combined with live first moment and further virtual STEM detector analysis. Processing of both real experimental and simulated data shows the characteristics of this method when data is processed progressively, as opposed to the usual offline processing of a complete dataset. In particular, the single side band method is compared to other techniques such as the enhanced ptychographic engine in order to ascertain its capability for structural imaging at increased specimen thickness. Qualitatively interpretable live results are obtained also if the sample is moved, or magnification is changed during the analysis. This allows live optimization of instrument as well as specimen parameters during the analysis. The methodology is especially expected to improve contrast- and dose-efficient in-situ imaging of weakly scattering specimens, where fast live feedback during the experiment is required. Key Words: 4D-STEM, Ptychography, First moment imaging, Phase retrieval, In2 Se3 , SrTiO3 (Received 6 May 2021; revised 6 July 2021; accepted 17 July 2021)) Introduction Rodenburg et al., 1993; Jiang et al., 2018; Humphry et al., 2012). The development of ultrafast cameras for transmission Due to its excellent dose efficiency (Zhou et al., 2020) electron microscopy (TEM) such as the pnCCD (Müller STEM ptychography as a method to retrieve the com- et al., 2012; Ryll et al., 2016), the Medipix3 chip (Plackett plex object transmission function has gained increasing et al., 2013), delay-line detectors (Müller-Caspary et al., interest. Four-dimensional data sets combining real and 2015; Oelsner et al., 2001) or the EMPAD (Tate et al., 2016) diffraction space information have been shown to provide enabled the collection of the full diffraction space up to enormous flexibility in post-acquisition processing. For a flexible cut-off spatial frequency at each scan point in example, ptychography has been demonstrated to be ca- scanning TEM (STEM). This technology paved the way for pable of both resolution improvement and aberration cor- momentum-resolved STEM techniques with high sam- rection after the acquisition using computational meth- plings in both real and diffraction space, sometimes be- ods (Nellist et al., 1995; Gao et al., 2017). It achieves a ing referred to as 4D-STEM. Acquisitions with a detec- better signal to noise ratio for weak phase objects than tor frame rate of several kHz are currently achieved by annular bright field or differential phase contrast (Seki employing these cameras. In particular, the mapping of et al., 2018) and allows reconstruction at extremely low electric fields and charge densities down to the atomic dose (O’Leary et al., 2020). scale (Müller et al., 2014), meso-scale strain, and elec- The high data rates require an efficient implementa- tric field measurements by nano-beam electron diffrac- tion of advanced methods for imaging contrast via post- tion (Müller-Caspary et al., 2015), and, furthermore, elec- processing in order to minimise the duration of numeri- tron ptychography (Hoppe, 1969; Hegerl & Hoppe, 1970) cal processing. Ultimately, computing and software im- have been enabled by this dramatic detector speed en- plementation capabilities are desirable that allow for the hancement (Nellist et al., 1995; Rodenburg & Bates, 1992; live reconstruction of the ptychographic phase and ampli- 1
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography tude, first moments, electric fields, and charge densities, often referred to as "centre-of-mass (COM)", this is triv- for example. ial to achieve since each detector frame, i.e., diffraction During experiments a region of interest is usually se- pattern, produces an independent entry in the final data lected via imaging employing conventional STEM detec- set which allows frames to be processed individually, ac- tors. Weakly scattering and beam sensitive specimens, cumulating results in a buffer. Displaying the contents where ptychography and first moment imaging (Waddell of this buffer at regular intervals provides a live-updating & Chapman, 1979; Müller et al., 2014) can be most ad- view. vantageous, generate poor contrast in conventional imag- In contrast, ptychography generates results by ing modes and quickly degrade using typical beam cur- putting detector frames from the entire data set, or at rents in conventional STEM (Peet et al., 2019). 4D-STEM least a local environment, in relation to each other. Con- analyses are normally applied after data acquisition and sequently, adapting the methodology so as to circumvent transfer to a data processing workstation. It is therefore the processing of the entire data set at once, thus grad- not possible to be certain that the selected region and ually merging partial results extracted from portions of microscope settings were appropriate until after success- the input data into the complete result, is necessary. As ful reconstruction. For that reason, one often acquires a previously demonstrated by Rodenburg & Bates (1992), larger number of data sets, which takes considerable stor- Rodenburg et al. (1993) and Pennycook et al. (2015), both age space in the case of 4D-STEM. In contrast, a fast im- phase and amplitude information can be extracted from plementation of the considered computational methods a set of diffraction patterns (usually restricting to the would allow to perform this data evaluation live during Ronchigram region) by performing the Fourier transform the experiment. of the four-dimensional data set with respect to the scan In this study, we demonstrate 4D-STEM continu- raster and reordering the dimensions. Depending on the ous live scanning with the simultaneous ptychographic model presumed for the interaction between specimen single-sideband (SSB) reconstruction combined with and incident STEM probe, the direct inversion of the data bright field, annular dark field, and first moment imag- can either be done by Wigner Distribution Deconvolu- ing, including its divergence which is proportional to the tion (WDD) or the SSB ptychography scheme (Rodenburg charge density in thin specimens. To this end, the ptycho- et al., 1993). Whereas WDD is based on a single interac- graphic algorithm was firstly reformulated mathemati- tion with an arbitrary complex object transmission func- cally. This allows navigation on the sample and change of tion and is capable of separating specimen and probe, the microscope parameters with a live view of the reconstruc- weak phase approximation tion, alongside signals from other 4D-STEM techniques. ψexit ( r®) = ψprobe ( r®) ·ei Φ ≈ ψprobe ( r®) · 1 + i φ ( r®) . (1) Secondly, we use SrTiO3 and In2 Se3 to demonstrate the live evaluation capability of our approach in experiments governs the SSB approach. Here, the specimen exit wave by in-situ processing of the data stream of an ultrafast at a given scan point can be expressed by a multiplication camera. Thirdly, the results obtained live are validated of the probe wave function ψprobe ( r®) with the first-order by conventional post-processing. Particular attention is Taylor expansion of a phase object with phase distribu- drawn to the capability of SSB to provide reliable struc- tion Φ( r®). It is hence limited to weakly scattering ultra- tural images, to reconstruction artefacts arising from pro- thin objects e.g. thin light matter investigated with rela- cessing partial scans and to reconstructing non-periodic tivistic electrons. Any quantitative interpretation of SSB objects. Moreover, the performances of SSB ptychogra- reconstructions of real data should, therefore, be exam- phy and the enhanced ptychographic engine (ePIE) are ined critically since eq. (1) breaks down quickly with in- compared, interestingly pointing towards SSB being sig- creasing thickness. Its capability of direct, dose-efficient nificantly more robust against dynamical scattering in phase recovery makes it nevertheless attractive for the in terms of qualitative structural imaging. This article closes situ qualitative assessment of specimen and imaging con- with a detailed discussion and a summary. ditions. A more advanced ptychography scheme can still be applied after recording. Because a data point in the Materials and Methods final reconstruction depends on all recorded scan points, the reconstruction is only accurate if it is applied to the full 4D data. Live imaging We refer to original work for a derivation of the con- A continuous live scanning display for large-scale 4D- ventional SSB methodology (Rodenburg & Bates, 1992; STEM data benefits greatly from a data processing Pennycook et al., 2015) and give a concise summary here. method where smaller portions of input data are pro- The first processing step consists of Fourier transforming cessed independently and merged progressively into the the 4D data cube as to the scan coordinate, translating complete result. For virtual detectors and first moments, the scan coordinate in real space to spatial frequencies Q® 2
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography lated to process smaller input data portions without zero- padding. The additivity and homogeneity of linear func- tions gives ample freedom to restructure the underlying data processing flow towards this goal, allowing develop- ment of mathematically equivalent implementations that are optimized for live imaging. In the particular case of SSB ptychography, individual spatial frequencies of the result Φ( r®) are extracted from spatial frequencies of signals at specific scattering angle ranges within the double overlaps (Rodenburg et al., 1993; Pennycook et al., 2015) introduced in Fig. 1. Suppose we have the intensity of diffraction patterns Fig. 1. Double overlap regions in the planes of the Fourier present as four-dimensional data, which is written as transformed 4D data cube are defined by three circles of the size Dx y ∈ Òm×n where x ∈ [s x ], y ∈ [s y ] and the no- of the probe-forming aperture. The distance Q between the cir- tation [s x ] represents the set of natural numbers not ex- cles is determined by the currently considered spatial frequency of the scan raster and defines the spatial frequency of Φ recon- ceeding s x − 1. That is, [s x ] := {0, 1, . . . , s x − 1} with the structed in this plane of the data cube. Potential triple overlaps total number of elements s x . The indices x, y represent for small Q need to be excluded. the scan position index, with the total number of scan- ning steps being s x and s y in each direction. Each matrix D is a diffraction pattern d pq where p and q represent sampled by the scanning probe. This new 4D data cube the pixel index on the detector with dimension m × n. can be ordered such that each scan spatial frequency de- Each pixel index pq corresponds to a scattering angle, or fines one plane. By employing the weak phase object ap- equivalently, spatial frequency in the specimen. proximation in eq. (1), Rodenburg et al. have shown ana- We can write the Fourier transform with respect to lytically that the data in each plane is described by three the scan raster as discs of the size of the probe-forming aperture, positioned sÕ y −1 x −1 sÕ yl −i 2π xk + sy at the origin and as Friedel pairs at the positions defined = , (2) sx fpq kl d pq xy e by the spatial frequency vector Q® . Importantly, double x =0 y =0 overlaps as depicted schematically in Fig. 1 contain the where k and l denote the spatial frequencies in the scan complex Fourier coefficients of i Φ, potentially affected dimension, taking the places of x and y . Therefore we ob- by aberrations of the probe-forming system. The double tain a four-dimensional dataset in the spatial frequency overlap regions are often referred to as trotters colloqui- domain, i.e., Fk l ∈ Ãm×n . ally. The next step in SSB is to apply a filter Bk l ∈ Ãm×n The ptychographic SSB reconstruction is a linear for each tuple of spatial frequencies k l that calculates the function of the input data since the result is obtained weighted average of the spatial frequency signal over spe- with a sequence of linear transformations, such as Fourier cific ranges of pixels, i.e. scattering angles pq , that can transforms, element-wise multiplication, and summation have positive or negative weight as defined by the trot- (Pennycook et al., 2015). Such linear functions are partic- ters. It should be noted that the structure of this filter is ularly suitable for incremental processing since they are different for each tuple of spatial frequencies. additive. Mathematically, the complete input data can Using (2), we can write the reconstruction in the be understood as the sum of smaller individual data por- Fourier domain p k l as tions that are padded with zeros to fill the shape of the m−1 n−1 complete data set. Additive functions allow to calculate ÕÕ pk l = the complete result by accumulating the processing re- fpq kl b pq kl p=0 q =0 sults of zero-padded portions in any subdivision and or- der. Furthermore, intermediate results can be extracted m−1 ÕÕ y −1 x −1 sÕ n−1 sÕ yk −i 2π sxxl + s y = at any desired stage from the yet incomplete sum of re- d pq x y e b pq k l sults. p=0 q =0 x =0 y =0 However, directly processing zero-padded data this sÕ y −1 m−1 x −1 sÕ Õ n−1 Õ −i 2π xs k + sy l way is very inefficient for computationally demanding = . b pq k l d pq x y e x y algorithms such as ptychography employing large 4D- x =0 y =0 p=0 q =0 STEM data, because the processing effort and mem- (3) ory consumption is amplified by the number of subdivi- The reformulation is given by interchanging the summa- sions. For that reason, the algorithm should be reformu- tion and the index dimension of detector and the index 3
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography of scan points in the real and frequency domain, respec- ficient for this application. A production-ready version tively. This nested summation can be pruned without with support for multiple processing nodes, further en- changing the result by skipping parts that are known hanced use of multiple CPUs and multiple GPUs similar to yield zero, for example calculations for empty double to the offline data processing capabilities of LiberTEM is overlap regions. Note that p k l essentially represents the being designed at the time of writing and will be pub- Fourier coefficients of i Φx y in eq. (1) which are poten- lished as open-source as a part of LiberTEM. tially affected by aberrations of the probe-forming sys- For comparison, ePIE (Maiden & Rodenburg, 2009) tem. based ptychographic reconstructions have been per- The inner part of eq. (3) can be implemented with a formed in post processing as it can reconstruct both matrix product between B and D. The outer sum over x the complex object transmission function and the com- and y can then be sub-divided and reordered to process plex illumination, still presuming single interaction of the input data D incrementally in smaller portions. Nu- probe and specimen, but considering an arbitrary com- merically, the filter matrix Bk l can be stored efficiently as plex object transmission function. This was done to check a sparse matrix since the trotters for the highest frequen- whether the straightforward SSB approach compromises cies are often empty (no overlap), and for many frequen- the quality of the result compared to more advanced pty- cies the double overlap region where the filter is non-zero, chographic schemes. It has to be noted that, as an iter- is small. ative method, ePIE is not suitable for live imaging in the As an intermediate summary, this formulation trans- current realisations. lates the SSB scheme to a matrix product of a partial in- put data matrix with a sparse matrix containing the dou- Material system ble overlap regions. Elements of a Fourier transform are We demonstrate live processing using two different spec- then applied to the result of this matrix product. This imens. First, indium selenide (In2 Se3 ) was used to high- generates a partial reconstruction result in the frequency light the advantages of live ptychography and centre domain that covers the entire field of view. The partial of mass in comparison to conventional STEM (Ye et al., reconstructions for all partial input data portions are ac- 1998). Second, a strontium titanate (SrTiO3 ) lamella with cumulated in a global buffer using a sum, as described the electron beam incident along the [100] axis for a more above. For a live view of the reconstruction in the spa- quantitative analysis was used. The latter is stable and tial domain, the contents of this buffer can be inversely provides good contrast in conventional STEM for compar- Fourier transformed at any desired time to show the ison and adjustments, is well-characterized, and at the transmission function of the specimen within the weak same time can highlight the ability to also resolve the phase object approximation. light oxygen columns that are difficult to image with reli- We used LiberTEM (Clausen et al., 2021) as a data pro- able contrast by conventional STEM techniques (Brown- cessing framework since it is optimized for MapReduce- ing et al., 1995). Too small double overlap regions with like approaches and designed with live data processing an area of less than 10 px were omitted in live processing capabilities in mind (Clausen et al., 2020). LiberTEM user- to avoid the introduction of excessive noise. This can be defined functions (UDFs) provide the application pro- understood as a band-pass filter applied to exclude the gramming interface (API) to efficiently implement oper- high frequencies close to the transfer limit of SSB pty- ations that follow the described pattern: A method to chography which corresponds to twice the radius of the process a stack of frames that is called repeatedly, task probe-forming aperture. data to store constant data such as the sparse matrix for the double overlaps, result buffers of arbitrary type Experimental setup and shape, and user-defined merging operations to gen- erate a result of arbitrary complexity from partial results. First moment imaging and ptychography require the cor- Furthermore, LiberTEM allows to update a result display rect alignment and calibration of the scan (specimen) co- each time a partial result is merged. UDFs for first mo- ordinate system with respect to the detector coordinate ment analysis and virtual detectors were already imple- system. The convergence angle of the incident probe was mented before for offline data analysis. measured with a polycrystalline gold specimen. Employ- To run the UDFs on live data, we implemented a pro- ing parallel illumination first, the (111) gold diffraction totype live UDF back-end that allows to run a set of ring was used to calibrate the diffraction space assum- UDFs on data from a Quantum Detectors Merlin for EM ing a lattice constant of gold of 0.4083 nm (Villars & Cen- Medipix3 for electron microscopy (Plackett et al., 2013; zual, 2016). With the known wavelength the convergence Quantum Detectors, 2019). It uses multiple CPU cores semi-angle was determined to 22.1 mrad from a Ronchi- for decoding the raw data from the detector, and a sin- gram recorded in the same STEM setting as used in the gle GPU for the main processing task, which was suf- actual experiment. 4
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography Fig. 2. Investigation of In2 Se3 nanosheets. (a) 3D view of the unit cell (left) and electrostatic potential projected along c. ® Note the different densities of atoms in c-direction at different Fig. 3. Live imaging of In2 Se3 nanosheets at atomic resolution sites. (b) Snapshots of live ptychography (phase) using the SSB for a 128 × 128 STEM scan. The atom columns are visible in all scheme at different stages of the scan. methods. The semi-convergence angle was 22.1 mrad. The rotation of the detector coordinate system with Live processing respect to the scan axes was determined by minimizing the curl of the first moment vector field and making sure The performance of our approach is demonstrated in that the divergence of the field is negative at atom po- Fig. 2 which depicts (a) the structure of In2 Se3 together sitions. Note that, in theory, the curl of purely electro- with the projected potential and (b) snapshots of the re- static fields should vanish. The pixel size in the scan di- constructed phase in nanosheets of this material using mension was taken from the STEM control software dur- SSB ptychography at different stages of the scan. The ing live processing and verified by comparison with the reconstruction is performed progressively such that only known lattice constant of SrTiO3 . The residual scan dis- the diffraction patterns of incoming scan pixels are pro- tortion, that is, the translation of the diffraction pattern as cessed and added to the final reconstruction according a whole during scanning, was not compensated for since to eq. (3) in which all pixels are affected. Whereas current it turned out to be negligible at the atomic-resolution research in the field of materials science explores ultra- STEM magnifications used in this analysis. thin In2 Se3 as a candidate for 2D ferroelectrics, this spec- Data was acquired at a probe-corrected FEI Titan imen was chosen due to its robustness against electron 80-300 STEM (Heggen et al., 2016) operated at 300 kV. dose for the methodological development. The data in The microscope was equipped with a Medipix Merlin for Fig. 2 b was taken from a live video recorded during the EM detector operated at an acquisition rate for a single STEM session, being available as supplementary material diffraction pattern of 1 kHz in continuous mode. The scan online. size was 128 × 128 scan points and the recorded diffrac- In general, the quality of the ptychographic recon- tion patterns had a dimension of 256 × 256 pixel. In ad- struction strongly depends on matching the position and dition, the high-angle annular dark field (HAADF) signal radius of the (usually circular) aperture function on the has been recorded with a Fischione Model 3000 detector detector with the double-overlap regions. Even small de- covering an angular range of 121.7 mrad to approximately viations lead to a mismatch between the mask borders 200 mrad. The upper limit is defined by apertures of the and the edges of the zero-order disk, which adds noise microscope rather than by the outer radius of the detec- and reconstruction errors from those erroneous border tor. The run time for each step of the data processing flow pixels. A precise alignment can be done, e.g. using a was measured using the line-profiler Python pack- position-averaged diffraction pattern or by recording the age. bright-field disc with the specimen removed from the field of view, as in our analyses. It must be pointed out that a partial SSB reconstruc- tion only approximates the result because not all spatial Results frequencies have been completely sampled at this point. However, it is already possible to see the atom columns 5
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography coarsely to a specimen region of interest without a new calibration or pre-calculation of the masks Bk l in eq. (3) to be time-efficient, and then observe or record details after switching back to the correct magnification again. Therefore, we studied to which extent the reconstruction is robust against a magnification change despite keeping the internal SSB parameters unchanged in Fig. 4 a-c. It showcases that the structural contrast is in general main- tained. A possible future development with only a mod- erate effort could be pre-defining double overlap masks for common magnifications in order to build a look-up table that solves inaccuracies. We assume without loss of generality regarding the algorithmic structure, that live processing is required at a dedicated magnification being equal to the final recording where data is actually stored, and mention a certain robustness against changes of the scan pixel size as a valuable side note. Fig. 4. Live variation of microscope parameters on SrTiO3 : During live reconstruction the parameters for SSB were not changed. From (a) to (c) the magnification is reduced. If the Computational details magnification is reduced further, SSB fails. In (d) the focus is changed during acquisition. The semi-convergence angle was In our implementation the sparse matrix product was the 22.1 mrad. throughput-limiting step. By using an efficient GPU im- plementation from cupyx.scipy.sparse (CuPy), this could be accelerated sufficiently to allow processing of over in the partial reconstructions. This allows time- and dose- 1000 frames per second at suitable parameters, enabling efficient live focusing and navigation to regions of inter- for live imaging using a Medipix3 sensor. est on specimens. In Fig. 3, complete reconstructions of The memory consumption of the current SSB pty- In2 Se3 are shown. All atom columns can be seen clearly in chography implementation scales as O (N ) with the the bright field images, in the divergence of the first mo- number of scan points at constant aspect ratio since the ment and in the phase of the object transmission function number of spatial frequencies to reconstruct scales lin- obtained by SSB ptychography. All signals were calcu- early with the number of scan points, and each recon- lated live from the 4D-STEM data stream. structed frequency adds a double overlap region. These Figure 4 depicts the phase of ptychographic SSB re- regions sample the diffraction data more densely when constructions of SrTiO3 performed live while changing extracting more spatial frequencies, meaning the aver- microscope parameters such as the STEM magnification age number of non-zero entries per trotter is roughly con- (scan pixel size) in Fig. 4 a-c, and the probe focus in stant for a given pixel size and beam parameters. As the Fig. 4 d. The full video showing live updating during processing time for dense-sparse matrix products roughly continuous scanning while microscope parameters are scales linearly with the number of non-zero entries in the changed is available in the supplementary material on- sparse matrix and number of vectors in the dense matrix, SSB scales poorly with O N 2 in computation time with line. the number of scan points. Although the inherent reconstruction parameters are The size of the matrix containing the double overlap naturally robust against a change of the probe focus for regions is highly dependent upon the acquisition param- direct ptychography schemes that do not intend to cor- eters in the present implementation. A larger camera rect aberrations, a magnification change influences the length increases the Ronchigram size, consequently in- relation between a spatial frequency in the reconstruc- creasing non-zero entries. The relationship between scan tion in pixel coordinates, and the pixel distance in sam- pixel size and the convergence angle changes the spatial ple coordinates. This means that the geometry of a dou- frequency limit above which no double overlaps occur. ble overlap region that contains the signal to reconstruct The less often spatial frequencies create double overlaps, a certain spatial frequency in the result changes with the smaller the matrix B becomes. In this study the scan magnification. In the strict sense, changing the magni- area for live processing was limited to a size of 128 × 128 fication without updating the scan step size (and double and microscope parameters were chosen to keep the ma- overlap masks) in the reconstruction is, therefore, math- trix size low enough to fit into the GPU RAM. ematically inaccurate. In practice, however, it is desirable to be able to lower the magnification so as to navigate 6
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography Fig. 5. Post processing of In2 Se3 . In all images, the positions of the two different atom columns of In2 Se3 can be seen. Post processing We concentrated up to this point, solely on the live eval- uation in order to facilitate optimisation of experimental parameters during the session. This avoided the need for saving vast amounts of 4D-STEM data that would have required significant disc space due to the continuous na- ture of the experiments. During the experiments only a few reliable data sets were recorded. To verify the relia- bility of our approach we compared the post-processing of the recorded data against the live experiment to deter- mine if the inherent parameters used in post-processing such as the Ronchigram position and radius, are in suffi- Fig. 6. Comparison between live imaging and post processing cient agreement with those of the live results. on SrTiO3 . In all images except (e), the positions of the stron- In Fig. 5, the post processing of In2 Se3 data is shown. tium and the titanium oxide atom columns are clearly visible. The position of the oxygen columns can only be seen in the SSB Here, the two different atom columns highlighted in results (d, g) and in the divergence of the first moment (b). The Fig. 2 a can be seen in the first moment vector field ePIE result does not show any information in the phase object. (Fig. 5 a), in its divergence (Fig. 5 b), and in the HAADF (h) The amplitude of the probe from the ePIE reconstruction image (Fig. 5 c). The phase of the SSB reconstruction shows some lattice information. The ePIE reconstruction has a (Fig. 5 d) also yields site-specific contrast, which is more 4° rotation compared to the other post processed results due to pronounced than in the live imaging result in Fig. 3 d. Re- the rotation angle. This owes to the implementation of deal- calling that SSB ptychography relies on the weak phase ing with the scan rotation. The semi-convergence angle was object approximation in eq. (1) that breaks down already 22.1 mrad, the sample thickness was approximately 25 nm, de- at the thinnest of specimen as to a quantitative inter- termined by comparing the PACBED with simulation as shown pretability, conclusions from relative phases among dif- in Figure 7. ferent atomic sites need to be drawn with great care. In Figure 6, a comparison between different signals as well as between live imaging and post processing of SrTiO3 is shown. Strontium titanate enables evaluation of the different imaging modes regarding their capabil- ity for simultaneous imaging of light oxygen columns and comparably heavy Sr and Ti oxide columns, adding to the results obtained for In2 Se3 in Fig. 5. The first moment vec- tor field (Fig. 6 a) predominantly shows the heavy atom columns as sinks. The fact this vector field also contains sinks at the oxygen sites becomes visible in the divergence map in Fig. 6 b, whereas the HAADF signal recorded sep- 7
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography Fig. 7. Comparison of the PACBED of the scan in Figure 6 with simulation: The best match is achieved at a simulated thickness of 25 nm. arately with the conventional annular detector in Fig. 6 c visualises only the heavy-atom sites of Sr and Ti oxide. In the post-processed SSB (Fig. 6d) the oxygen columns can be easily determined simultaneously with the heavy sites. The live SSB (Fig. 6g) has some noise, but the oxy- Fig. 8. Phase grating that was used for the simulation for the gen columns are still visible. Moreover, a comparison of partial SSB-reconstructions in Figure 9. the conventional HAADF in Fig. 6 c with the annular dark field signal generated by a virtual annular detector ap- plied to the 4D-STEM data in Fig. 6 f demonstrates that plicative interaction scheme is incapable of delivering the practically all main contrast mechanisms exploiting low- details of the diffraction pattern, so that the algorithm as well as high-angle scattering can be captured by the does not converge to a reliable solution. In this particular 4D-STEM imaging mode. case ePIE has put some lattice information in the probe Earlier we stated that the live ptychographic recon- (Fig. 6 h). This will be studied in the next subsection by struction exploits the SSB algorithm, because it is a non- means of simulations. iterative, linear and direct scheme that allows for in-situ To summarise the experimental results, performing processing. However, the weak phase object interaction live ptychography using the SSB method had originally model given by eq. (1) is a seemingly drastic limitation of been motivated by computational aspects, but contrary this approach. In the analysis of post processing data, it to expectations it also turns out to be more robust against is beneficial to explore whether a ptychographic scheme the violation of the weak phase object approximation and based more on an advanced interaction model, neglect- dynamical scattering. Of course, this only holds for quali- ing computational hardware constraints for the moment, tative imaging, but it is a significant advantage in practice could have been the better choice for live ptychography. where suitable structural contrast is obtained also at ele- To this end, we used the ePIE algorithm to reconstruct vated specimen thickness for both light and heavy atomic the SrTiO3 data as shown in Fig. 6 e. The standard ePIE columns. implementation clearly does not give a reasonable result, at least for the usual reconstruction settings reported in Simulation studies literature that we used here. To explore this in more detail, the sample thickness was determined to approx- Partial reconstruction. As the implementation of live imately 25 nm by comparing the experimental PACBED ptychography based on eq. (3) maps the result of single with a thickness dependent simulation as in Fig. 7. Con- scan points successively to the final reconstruction, a sim- sequently, the specimen thickness was far beyond the va- ulation study has been conducted in which we investi- lidity of both the weak phase object approximation and gated the accuracy of the reconstructed phase in already the single-slice model used in ePIE. At first sight it is scanned regions in dependence of the scan progress. A nevertheless surprising that the latter approach performs synthetic dataset has been simulated, based on an SrTiO3 worse, since one must consider it more advanced than the unit cell as a starting point. Then, a five by five super cell weak phase model from the viewpoint of scattering the- was created by repetition and the phase grating (Fig. 8) ory. In fact, ePIE tries to iteratively find both the probe has been calculated. Two artificial spatial frequencies and the object transmission function in such a way that were added to the phase grating, one with a wavelength the modulus of the Fourier transform of their product of a single unit cell and one with a wavelength of the su- agrees best with all details of the experimental diffrac- per cell. To eliminate dynamical scattering in this con- tion data. When dynamical scattering sets in, this multi- ceptual study, a 4D-STEM simulation with 20 × 20 scan 8
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography points per unit cell was performed using only one slice with a thickness of one unit cell along electron beam di- rection [001]. Finally, partial SSB reconstructions have been performed using the full range of scan pixels in ver- tical directions, but only portions of 20 scan pixels hor- izontally, mimicking a reconstruction during progressive scanning as depicted in Fig. 9. An animation calculated from 100 single pixel columns is available in the supple- mentary material. Figure 9 contains the individual blocks of the 20 scan pixel wide reconstructions in the left hand column, and the accumulated result on the right hand side with the scan progressing from top to bottom. Consequently, the phase bottom right is the final reconstruction for the full scan, obtained by our cumulative approach which we found to be identical to a reconstruction using the con- ventional treatment employing the whole 4D scan. Only here, the low, medium and atomic-scale spatial frequen- cies are reconstructed correctly without artefacts. In that respect, it is instructive to explore the partial reconstruc- tions in Fig. 9. Since we used subsets that equal the size of a single unit cell, spatial frequencies down to the synthetic one with a period of one unit cell appear at least qualitatively in all partial reconstructions. The sharp edges between the available data and the yet-missing region have resulted in a ringing effect near the edges known as the Gibbs-phenomenon. A closer look at the left column of Fig. 9 exhibits that these artefacts largely interfere destructively during accumulation as seen, e.g. by a maximum at horizontal scan pixel 20 in the top row and a minimum at this position in the row below. Conse- quently, ringing artefacts become less obvious in the full reconstruction on the right within the region that has al- ready been scanned. Therefore, it is already possible to vi- sualise the atomic structure and partly meso-scale phase variations for partial scans, making it possible to navigate on the sample and visually interpret results in a real ex- periment. Real specimens and scan regions do not usually ful- fill periodic boundary conditions which still apply to the full scan of Fig. 9. Therefore, Fig. 10 shows the impact of selecting different reconstruction areas by simulating the reconstruction of a smaller scan area that is not aligned with the underlying lattice. SSB reconstructs the spec- imen with an assumption of a periodic boundary con- dition and cannot reconstruct spatial frequencies above a certain threshold, as previously discussed. Trying to Fig. 9. Visualization of accumulation of partial reconstruc- reconstruct a field of view where wrapping around the tions using a synthetic dataset of simulated SrTiO3 combined edges creates a discontinuity, i.e. frequencies higher than with long-range potential modulation. The left column shows SSB can reconstruct, leads to reconstruction artefacts as the reconstruction of disjoint subsets of the input data, and the seen in Fig. 9. Quantitatively, the difference between the right one the accumulated result until all data is processed and the complete result is obtained. An animation with smaller sub- ground truth taken from the marked rectangle of the full divisions is available in the supplementary material. reconstruction in Fig. 10 a and a reconstruction that solely employs the scan pixels therein, as seen in Fig. 10 b is 9
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography using 20 × 20 scan pixels. The data was evaluated for thicknesses of 1 nm and 30 nm, addressing both the kine- matic case and the situation of elevated thickness in our experiment. The results have been compiled in Fig. 11. Figure 11 a shows the phase grating used in the multi- slice simulation for structural reference. In figure part (b) we added the theoretical result that would be obtained for SSB ptychography in case all methodological premises were fulfilled in practice. That is, we generated a 4D- STEM data set by means of the weak phase approxima- tion in eq. (1) for a single slice with the thickness of one SrTiO3 unit cell and performed the SSB reconstruction. Note that this is identical to the phase Φ in eq. (1), low- pass filtered with a circular aperture that has twice the radius of the probe-forming aperture. Figures 11 c-j show the results of evaluating the 1 nm (left column) and the 30 nm data (right column) using different methods aligned row-wise. As can be expected from former studies employing first moment based imag- ing (Müller-Caspary et al., 2017; Müller et al., 2014) of cen- trosymmetric structures, Figs. 11 c-f resemble the atomic structure in terms of momentum transfer vector maps and their divergences with the atoms being sites of cen- tral fields. This is preserved in qualitative manner only for more elevated thicknesses. Note that Figs. 11 c and e are proportional to the probe-convoluted distributions of the projected electric field and charge density, respectively. Fig. 10. Reconstruction limited to a cutout from the data in Similarly, the SSB reconstructions in Figs. 11 g and h both reconstructed area and input data, as opposed to partial yield reliable structural contrast at both low and elevated reconstruction of the area of the full dataset in Figure 9. (a) thickness despite the violation of the weak phase approx- shows the selected cutout area from the full reconstruction, (b) imation in eq. (1), which confirms our interpretation in the reconstruction limited to this area, and (c) the difference the post processing section. However, already the result between the two. This demonstrates how a discontinuity from in Fig. 11 g should be considered as qualitative except for wrapping around at the edges for a periodic boundary condition creates reconstruction artefacts due to the high frequency cut- the oxygen sites. Please note that the probe had been fo- off of SSB. cused on the specimen surface in the simulation. Because the SSB reconstruction considers the 30 nm thick speci- men as a single slice here, the optimum focus would have mapped in Fig. 10 c and can take significant values of 5- been at some depth inside the specimen which is one rea- 10 % of the phase itself in the present example. son why atomic sites appear slightly broader (Fig. 11 h). As a solution, the field of view where an accurate re- The situation is different for the ePIE results in construction is required can be surrounded by a smooth Figs. 11 i,j. Whereas the reconstruction for the thin spec- transition to a zero-valued buffer area so that the pres- imen in Fig. 11 i represents the phase excellently and ence of spatial frequencies above the resolution limit can be considered quantitative within the general frame- is minimized when the reconstruction area is wrapped work of validity of ePIE, the algorithm has severe diffi- around at the edges. In future studies a Lanczos filter- culties in reconstructing the object transmission function ing (Duchon, 1979) scheme could be added for our live at 30 nm thickness in Fig. 11 j. In Fig. 11 k the recon- ptychography approach. structed probe looks like an airy disc. This is the result Thickness effects. A comprehensive algorithmic re- of an aberration free probe, limited only by an aperture view is not our focus but touching briefly on the findings in diffraction space, and that was used in the simulation. in conjunction with Fig. 6 we elucidate the impact of dy- In Fig. 11 l sample information is transferred to the probe. namical scattering, or, equivalently, specimen thickness, This further confirms our observations concerning ePIE on different signals. A multislice simulation (Rosenauer & in the post processing section by simulation. However, Schowalter, 2007) has been performed for SrTiO3 in [001] Fig. 6 e,h gives even less information from the specimen projection employing the experimental parameters and than Fig. 11 j,l, which can be attributed to Poisson noise 10
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography neglected in the simulation, residual aberrations, and im- portantly, different manners of separating probe and ob- ject which starts to fail when dynamical scattering sets in. To conclude, selecting the SSB scheme for live imag- ing of structural contrast can also be supported from the simulation point of view. Low dose. The performance of the SSB reconstruc- tion and the divergence of the first moment was checked in a low dose simulation (Fig. 12). At 1000 electrons per Å2 (Fig. 12a,b) the heavy atom columns are visible. At this dose, the SSB reconstruction gives stronger contrast than the divergence of the first moment. At 10000 elec- trons per Å2 (Fig. 12c,d) also the oxygen atom columns are visible. The SSB reconstruction and the divergence of the first moment shows similar performance at this dose. Discussion The digitisation that took place decades ago with key de- velopments such as charge-coupled device (CCD) cam- eras and computer controlling, processing and visual- isation in STEM denotes one of the drastic paradigm changes in electron microscopy. It enabled the live assess- ment of recorded data and transformed an optimisation of experimental parameters from multiple sessions to a quick feedback loop taking only several minutes within a single session. Surprisingly, innovative hardware as- sociated with an increase of the dimensionality of the recorded data has, to some extent, put us back to an- cient workflows for advanced methodologies. A major challenge for contemporary imaging in the era of Big Data is thus to make current ex-situ multidimensional evaluations capable for live imaging. Within this con- text, the present work shall be seen as a first step that demonstrates the feasibility of such a workflow using a rather straightforward example. Our work highlights the ongoing push towards high-performance computational methods in electron microscopy that are driven by an in- creasing camera performance (Weber et al., 2020). That includes suitable software frameworks, connections, stor- age, processing hardware, and know-how in computer science and engineering to be used in synergy with es- Fig. 11. Simulations for SrTiO3 : (a) Phase grating used for tablished and future imaging methodologies. multislice simulation, (b) SSB from a single slice simulation us- Several important general conclusions can be drawn ing also the weak phase approximation in the simulation, (c, d) First moment, (e, f) Divergence of first moment, (g, h) SSB from the present study. First, adequate computational without using weak phase approximation in the simulation of hardware is already available for this purpose, given that the 4D-STEM-data, (i, j) phase object from ePIE, (k,l) probe am- the mathematical formulation can be adapted to make plitude from ePIE, (c, e, g, i, k) 1 nm sample thickness and (d, use of it efficiently. Second, and most importantly, open f, h, j, l) 30 nm sample thickness. The simulation parameters and well-defined software interfaces which were avail- where chosen to match those used in the experiments. Addi- able for the hardware used here, are key prerequisites to tionally the following parameters were used: 22.1 mrad semi- implement nonstandard imaging concepts developed in convergence angle and 20 by 20 scan points per unit cell. science into established infrastructures. Third, it can be beneficial to exploit partly simplistic models to achieve live imaging capabilities, exemplified here by the use of 11
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography tics from the numerical and scientific aspects of the used algorithms. The prototype data decoder and UDF run- ner could easily keep up with the data rate of the Merlin detector. UDFs with low computational load such as vir- tual detectors or first moments remained at single-digit CPU load percentages. That means much higher data rates are likely to be possible with a suitable distributed UDF runner implementation. This will be required to sup- port multi-chip cameras such as the Gatan K2 or K3 IS or X-Spectrum Lambda. Computationally intensive opera- tions like ptychography are more challenging to scale to such data rates. The poor scaling behaviour of the current SSB imple- mentation has proven to be a limiting factor. For illus- tration, doubling the scan resolution at constant aspect ratio quadruples the number of scan points and results in Fig. 12. Low dose simulation for SrTiO3 : (a, c) Divergence of 16x increased computation time. In future, an implemen- first moment, (b, d) SSB without using weak phase approxima- tation that significantly reduces the computational load tion in the simulation of the 4D-STEM-data, (a, b) at 1000 elec- would be highly desirable to make this technique useful trons per Å2 , (c, d) at 10000 electrons per Å2 . The simulation for mainstream data analysis. Ideally there would be a parameters where the same as in Figure 11c. constant memory consumption independent of scan area and O (N ) or O (N log N ) scaling for computation effort as a function of the number of scan points. the SSB algorithm for a materials science case. On the one hand, it violates inherent assumptions significantly, on the other hand, the qualitative nature of the results Summary is better than one might expect from the weak phase approximation. In particular, the present setup can be Live imaging of central 4D-STEM signals such as the considered to be highly beneficial for low-dose ptycho- ptychographic phase, first moments, their divergence graphic live imaging of challenging specimen in the fields and rotation, as well as flexible virtual detectors has of structural biology and soft matter in Cryo electron mi- been demonstrated. A direct processing of the data croscopy. A suitable experimental setup with open soft- stream of a Medipix3 chip mounted in an aberration- ware interfaces to tap the data stream of a 4D-Cryo- corrected STEM was implemented. An enhanced version STEM experiment was unfortunately not available to the is available open-source under https://github.com/ authors to enable the inclusion of respective examples in LiberTEM/LiberTEM-live. A prototype was used to the present report. On the other hand, this would not generate the live results and is available upon request. change the methodological setup worked out in this pa- The live imaging capability could be demonstrated for per using solid-state examples. two materials science cases In2 Se3 and SrTiO3 , where The current implementation mainly served to inves- single-sideband ptychography proved surprisingly robust tigate the fundamental feasibility and characteristics of against imaging at elevated specimen thicknesses around ptychography for live imaging. Integrating the param- 20 nm. It is anticipated that the live imaging approach eter selection and results display in to existing instru- presented here, and the transfer of such direct workflows ment control software could be the next steps to im- to further imaging methods, can also enhance imaging prove the usability, making it more practical to apply rou- in life sciences where, e.g., ptychography is a promising tinely in microscopy. In that respect, live focusing, stig- candidate for high-contrast, low-dose imaging of weakly mation, and, prospectively, correction of further aberra- scattering objects without compromising spatial resolu- tions based on ptychography are possible. Furthermore, tion. the implementation can be extended to include mitiga- Acknowledgements Knut Müller-Caspary, Achim Strauch tion of artefacts from the edges that are demonstrated in and Benjamin März were supported by funding from the Initia- tive and Network Fund of the Helmholtz Association (Germany) Figure 10. under contract VH-NG-1317 (moreSTEM project). Dieter We- Existing LiberTEM UDFs that were previously only ber, Alexander Clausen, Arya Bangun, Benjamin März and Knut used for offline processing were applied to live data with- Müller-Caspary acknowledge support from Helmholtz within out modification, proving a long-standing design goal of the project "Ptychography 4.0" under contract ZT-I-0025. Dieter LiberTEM (Clausen et al., 2020). In particular, the UDF Weber, Alexander Clausen and Rafal Dunin-Borkowski received interface allowed to disentangle details of the data logis- funding from the European Union’s Horizon 2020 research and 12
Achim Strauch, Dieter Weber et al: Live first moment imaging and ptychography innovation programme under grant agreements No. 823717 – Hegerl, R. & Hoppe, W. (1970). Dynamische theorie der ESTEEM3 and No. 780487 - VIDEO. kristallstrukturanalyse durch elektronenbeugung im in- homogenen primärstrahlwellenfeld, Berichte der Bunsen- gedellschaft für physikalische Chemie 74, 1148–1154. Supplementary material Heggen, M., Luysberg, M. & Tillmann, K. (2016). FEI titan 80-300 STEM, Journal of large-scale research facilities JLSRF 2, 1. Video of live view: https://www.youtube.com/ A42, URL http://jlsrf.org/index.php/lsf/article/ watch?v=6s_ewwgOhoI view/67. 2. Animation of gradual processing: Hoppe, W. (1969). Beugung im inhomogenen https://ptychography-4-0.github.io/ Primärstrahlwellenfeld. I. Prinzip einer Phasen- ptychography/algorithms.html messung von Elektronenbeungungsinterferenzen, Acta Crystallographica Section A 25, 495–501, URL 3. Full software stack: Clausen et al. (2021); Clausen & https://doi.org/10.1107/S0567739469001045. Weber (2021); Weber et al. (2021) Humphry, M., Kraus, B., Hurst, A., Maiden, A. & Roden- burg, J. (2012). Ptychographic electron microscopy using 4. Sample notebooks: https://github.com/Ptychography- high-angle dark-field scattering for sub-nanometre resolu- 4-0/ptychography/tree/master/examples tion imaging, Nature Communications 3, 730, URL http: //www.nature.com/articles/ncomms1733. 5. Selected data sets on Zenodo: Strauch et al. (2021a,b) Jiang, Y., Chen, Z., Han, Y., Deb, P., Gao, H., Xie, S., Purohit, P., Tate, M.W., Park, J., Gruner, S.M., References Elser, V. & Muller, D.A. (2018). Electron ptychography of 2d materials to deep sub-ångström resolution, Nature Browning, N.D., Pennycook, S.J., Chisholm, M.F., McGIB- 559, 343–349, URL http://www.nature.com/articles/ BON, M.M. & McGIBBON, A.J. (1995). Observation of s41586-018-0298-5. structural units at symmetric [001] tilt boundaries in SrTi03, Maiden, A.M. & Rodenburg, J.M. (2009). An improved Interface Science 2, 397–423. ptychographical phase retrieval algorithm for diffrac- tive imaging, Ultramicroscopy 109, 1256–1262, URL Clausen, A. & Weber, D. (2021). LiberTEM/LiberTEM- https://linkinghub.elsevier.com/retrieve/pii/ live: 0.1.0, URL https://github.com/LiberTEM/ S0304399109001284. LiberTEM-live/. Müller, K., Krause, F.F., Beche, A., Schowalter, M., Galioit, Clausen, A., Weber, D., Ruzaeva, K., Migunov, V., Babu- V., Löffler, S., Verbeeck, J., Zweck, J., Schattschneider, rajan, A., Bahuleyan, A., Caron, J., Chandra, R., P. & Rosenauer, A. (2014). Atomic electric fields revealed Dey, S., Halder, S., Katz, D.S., Levin, B.D., Nord, by a quantum mechanical approach to electron picodiffrac- M., Ophus, C., Peter, S., Schyndel van, J., Shin, J., tion, Nature Comm 5, 5653:1–8, URL http://dx.doi.org/ Sunku, S., Müller-Caspary, K. & Dunin-Borkowski, R.E. 10.1038/ncomms6653. (2021). LiberTEM/LiberTEM: 0.7.1, URL https://github. com/LiberTEM/LiberTEM/. Müller-Caspary, K., Krause, F.F., Grieb, T., Löffler, S., Schowalter, M., Béché, A., Galioit, V., Marquardt, D., Clausen, A., Weber, D., Ruzaeva, K., Migunov, V., Babura- Zweck, J., Schattschneider, P., Verbeeck, J. & Rosenauer, jan, A., Bahuleyan, A., Caron, J., Chandra, R., Halder, S., A. (2017). Measurement of atomic electric fields and charge Nord, M., Müller-Caspary, K. & Dunin-Borkowski, R.E. densities from average momentum transfers using scan- (2020). LiberTEM: Software platform for scalable multidimen- ning transmission electron microscopy, Ultramicroscopy 178, sional data processing in transmission electron microscopy, 62–80, URL http://www.sciencedirect.com/science/ Journal of Open Source Software 5, 2006, URL https://doi. article/pii/S0304399116300596. org/10.21105/joss.02006. Müller, K., Ryll, H., Ordavo, I., Ihle, S., Strüder, L., Volz, K., Zweck, J., Soltau, H. & Rosenauer, A. (2012). Scanning CuPy (2015). A numpy-compatible array library accelerated by transmission electron microscopy strain measurement from cuda, URL https://cupy.dev/. millisecond frames of a direct electron charge coupled de- vice, Applied Physics Letters 101, 212110, URL http://aip. Duchon, C.E. (1979). Lanczos filtering in one and two dimen- scitation.org/doi/10.1063/1.4767655. sions, Journal of Applied Meteorology 18, 1016–1022. Müller-Caspary, K., Oelsner, A. & Potapov, P. (2015). Two- Gao, S., Wang, P., Zhang, F., Martinez, G.T., Nellist, P.D., dimensional strain mapping in semiconductors by nano- Pan, X. & Kirkland, A.I. (2017). Electron ptychographic mi- beam electron diffraction employing a delay-line detec- croscopy for three-dimensional imaging, Nat Commun 8, 163, tor, Applied Physics Letters 107, 072110, URL http://aip. URL https://doi.org/10.1038/s41467-017-00150-1. scitation.org/doi/10.1063/1.4927837. 13
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